Process optimization and related material properties of silicon films produced by laser-induced chemical vapour deposition from silane

1996 ◽  
Vol 31 (4) ◽  
pp. 1013-1019 ◽  
Author(s):  
S. Tamir ◽  
J. Zahavi ◽  
Y. Komem ◽  
M. Eizenberg
Keyword(s):  
Process Optimization ◽  
Chemical Vapour Deposition ◽  
Material Properties ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Silicon Films ◽  
Related Material

Silicon Films Deposited by Low-Pressure Chemical Vapour Deposition for Microsystems

2003 ◽  
Vol 93 ◽  
pp. 453-458 ◽  
Author(s):  
H. Mahfoz-Kotb ◽  
A.C. Salaün ◽  
T. Mohammed-Brahim ◽  
F. Bendriaa ◽  
F. Le Bihan ◽  
...  
Keyword(s):  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Low Pressure ◽  
Silicon Films ◽  
Pressure Chemical

Problem of catalyst ageing during the hot-wire chemical vapour deposition of thin silicon films

2009 ◽  
Vol 517 (11) ◽  
pp. 3370-3377 ◽  
Author(s):  
D. Hrunski ◽  
M. Scheib ◽  
M. Mertz ◽  
B. Schroeder
Keyword(s):  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Silicon Films ◽  
Hot Wire ◽  
Thin Silicon

Structure and Optical Properties of Hydrogenated Silicon Films Prepared by Plasma Enhanced Chemical Vapour Deposition

1996 ◽  
Vol 51-52 ◽  
pp. 249-254 ◽  
Author(s):  
A.A. Andreev ◽  
Alexander V. Andrianov ◽  
B.Y. Averboukh ◽  
R. Mavljanov ◽  
S.B. Aldabergenova ◽  
...  
Keyword(s):  
Optical Properties ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Silicon Films ◽  
Hydrogenated Silicon
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