Maximum entropy deconvolution of secondary ion mass spectra with a measured response

1994 ◽  
Vol 349 (1-3) ◽  
pp. 186-190 ◽  
Author(s):  
M. Ritter ◽  
H. Hutter ◽  
M. Grasserbauer
1993 ◽  
Vol 20 (8) ◽  
pp. 696-702 ◽  
Author(s):  
P. N. Allen ◽  
M. G. Dowsett ◽  
R. Collins

1995 ◽  
Vol 30 (2) ◽  
pp. 282-289 ◽  
Author(s):  
Gary J. Kunkel ◽  
Kenneth L. Busch ◽  
Richard Dunphy ◽  
David J. Burinsky ◽  
Ruth Barak ◽  
...  

1994 ◽  
Vol 23 (6) ◽  
pp. 353-356 ◽  
Author(s):  
Michael G. Bartlett ◽  
Kenneth L. Busch
Keyword(s):  

1973 ◽  
Vol 18 (3-4) ◽  
pp. 269-273 ◽  
Author(s):  
H. W. Werner ◽  
H. A. M. De Grefte ◽  
J. Van Den Berg

Author(s):  
М.Н. Дроздов ◽  
Ю.Н. Дроздов ◽  
А.И. Охапкин ◽  
С.А. Краев ◽  
М.А. Лобаев

AbstractNew possibilities offered by the method of secondary ion mass spectrometry (SIMS) for analysis of the phase composition of carbon-containing materials are considered. Differences are established between the mass spectra of three carbon phases: diamond, diamond-like carbon (DLC), and graphite. A simple algorithm for the quantitative determination of different phases in two-phase systems diamond–graphite and DLC–graphite is proposed that is based on the measurement of relative intensities of secondary cluster ions such as C_8/C_5 and CsC_8/CsC_4. It is shown that nonuniform depth profiles of various carbon phases are formed in diamond structures upon laser cutting and in DLC structures upon thermal annealing.


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