Investigation of Surface Integrity in the Case of Chemical Mechanical Polishing Silicon Wafer by Molecular Dynamics Simulation Method

Advances in Artificial Reality and Tele-Existence - Lecture Notes in Computer Science ◽

10.1007/11941354_67 ◽

2006 ◽

pp. 651-659

Author(s):

Xuesong Han

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Silicon Wafer ◽

Surface Integrity ◽

Chemical Mechanical Polishing ◽

Simulation Method ◽

Mechanical Polishing ◽

Dynamics Simulation

Download Full-text

Mechanical model of single abrasive during chemical mechanical polishing: Molecular dynamics simulation

Tribology International ◽

10.1016/j.triboint.2018.12.018 ◽

2019 ◽

Vol 133 ◽

pp. 40-46 ◽

Cited By ~ 8

Author(s):

Ruling Chen ◽

Shaoxian Li ◽

Zhe Wang ◽

Xinchun Lu

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Chemical Mechanical Polishing ◽

Mechanical Model ◽

Mechanical Polishing ◽

Dynamics Simulation

Download Full-text

Molecular dynamics simulation of abrasive characteristics and interfaces in chemical mechanical polishing

Applied Surface Science ◽

10.1016/j.apsusc.2019.144676 ◽

2020 ◽

Vol 509 ◽

pp. 144676 ◽

Cited By ~ 8

Author(s):

Van-Thuc Nguyen ◽

Te-Hua Fang

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Chemical Mechanical Polishing ◽

Mechanical Polishing ◽

Dynamics Simulation

Download Full-text

Tight-Binding Quantum Chemical Molecular Dynamics Simulation on Chemical Mechanical Polishing Process of Cu Surface

10.7567/ssdm.2003.p3-9 ◽

2003 ◽

Author(s):

Naoyuki Isoda ◽

Katsumi Sasata ◽

Toshiyuki Yokosuka ◽

Akira Endou ◽

Momoji Kubo ◽

...

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Chemical Mechanical Polishing ◽

Quantum Chemical ◽

Tight Binding ◽

Mechanical Polishing ◽

Dynamics Simulation ◽

Polishing Process ◽

Chemical Mechanical Polishing Process ◽

Quantum Chemical Molecular Dynamics

Download Full-text

Investigation of material removal mechanism of silicon wafer in the chemical mechanical polishing process using molecular dynamics simulation method

Applied Physics A ◽

10.1007/s00339-009-5097-2 ◽

2009 ◽

Vol 95 (3) ◽

pp. 899-905 ◽

Cited By ~ 43

Author(s):

Xuesong Han ◽

Yuanzhong Hu ◽

Siyuan Yu

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Chemical Mechanical Polishing ◽

Material Removal ◽

Simulation Method ◽

Dynamics Simulation ◽

Removal Mechanism ◽

Material Removal Mechanism ◽

Polishing Process ◽

Chemical Mechanical Polishing Process

Download Full-text

Insights into the atomistic behavior in diamond chemical mechanical polishing with OH environment using ReaxFF molecular dynamics simulation

Computational Materials Science ◽

10.1016/j.commatsci.2019.05.001 ◽

2019 ◽

Vol 166 ◽

pp. 136-142 ◽

Cited By ~ 2

Author(s):

Zhuoying Shi ◽

Zhuji Jin ◽

Xiaoguang Guo ◽

Song Yuan ◽

Jiang Guo

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Chemical Mechanical Polishing ◽

Mechanical Polishing ◽

Dynamics Simulation

Download Full-text

Atom-by-Atom and Sheet-by-Sheet Chemical Mechanical Polishing of Diamond Assisted by OH Radicals: A Tight-Binding Quantum Chemical Molecular Dynamics Simulation Study

ACS Applied Materials & Interfaces ◽

10.1021/acsami.1c09468 ◽

2021 ◽

Vol 13 (34) ◽

pp. 41231-41237

Author(s):

Kentaro Kawaguchi ◽

Yang Wang ◽

Jingxiang Xu ◽

Yusuke Ootani ◽

Yuji Higuchi ◽

...

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Simulation Study ◽

Chemical Mechanical Polishing ◽

Quantum Chemical ◽

Tight Binding ◽

Mechanical Polishing ◽

Dynamics Simulation ◽

Oh Radicals ◽

Quantum Chemical Molecular Dynamics

Download Full-text

Abrasive rolling effects on material removal and surface finish in chemical mechanical polishing analyzed by molecular dynamics simulation

Journal of Applied Physics ◽

10.1063/1.3575177 ◽

2011 ◽

Vol 109 (8) ◽

pp. 084335 ◽

Cited By ~ 27

Author(s):

Lina Si ◽

Dan Guo ◽

Jianbin Luo ◽

Xinchun Lu ◽

Guoxin Xie

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Surface Finish ◽

Chemical Mechanical Polishing ◽

Material Removal ◽

Mechanical Polishing ◽

Dynamics Simulation

Download Full-text

Femtosecond photoelectron spectroscopy of the I2− anion: A semiclassical molecular dynamics simulation method

The Journal of Chemical Physics ◽

10.1063/1.478263 ◽

1999 ◽

Vol 110 (8) ◽

pp. 3736-3747 ◽

Cited By ~ 63

Author(s):

Victor S. Batista ◽

Martin T. Zanni ◽

B. Jefferys Greenblatt ◽

Daniel M. Neumark ◽

William H. Miller

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Photoelectron Spectroscopy ◽

Simulation Method ◽

Dynamics Simulation

Download Full-text

Complete reconstruction of dasatinib unbinding pathway from c-Src kinase by supervised molecular dynamics simulation method; assessing efficiency and trustworthiness of the method

Journal of Biomolecular Structure and Dynamics ◽

10.1080/07391102.2021.1972839 ◽

2021 ◽

pp. 1-11

Author(s):

Farzin Sohraby ◽

Mostafa Javaheri Moghadam ◽

Masoud Aliyar ◽

Hassan Aryapour

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Src Kinase ◽

Simulation Method ◽

Dynamics Simulation

Download Full-text

Effects of Moisture on the Mechanical Properties of Microcrystalline Cellulose and the Mobility of the Water Molecules as Studied by the Hybrid Molecular Mechanics-Molecular Dynamics Simulation Method

Journal of Polymer Science Part B Polymer Physics ◽

10.1002/polb.24801 ◽

2019 ◽

Vol 57 (8) ◽

pp. 454-464 ◽

Cited By ~ 7

Author(s):

Iwan H. Sahputra ◽

Alessio Alexiadis ◽

Michael J. Adams

Keyword(s):

Mechanical Properties ◽

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Molecular Mechanics ◽

Microcrystalline Cellulose ◽

Simulation Method ◽

Dynamics Simulation ◽

Water Molecules

Download Full-text