Development and experimental validation of automatic conversion procedure from mechanical to electrical connection for MEMS equivalent circuit
2009 ◽
Vol 4
(3)
◽
pp. 352-357
◽
Keyword(s):
Keyword(s):
2015 ◽
Vol 34
(6)
◽
pp. 1719-1730
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2018 ◽
Vol 66
(4)
◽
pp. 1646-1659
◽
1993 ◽
Vol 140
(6)
◽
pp. 377
Keyword(s):