scholarly journals Flexible Electronics: Highly Manufacturable Deep (Sub-Millimeter) Etching Enabled High Aspect Ratio Complex Geometry Lego-Like Silicon Electronics (Small 16/2017)

Small ◽  
2017 ◽  
Vol 13 (16) ◽  
Author(s):  
Mohamed Tarek Ghoneim ◽  
Muhammad Mustafa Hussain
Keyword(s):  
Aspect Ratio ◽  
Flexible Electronics ◽  
High Aspect Ratio ◽  
Complex Geometry ◽  
Silicon Electronics

High-aspect-ratio through-wafer parylene beams for stretchable silicon electronics

2009 ◽  
Vol 156 (1) ◽  
pp. 257-264 ◽  
Author(s):  
T. Zoumpoulidis ◽  
M. Bartek ◽  
P. de Graaf ◽  
R. Dekker
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Silicon Electronics
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