The unusual tribological behavior of diamond‐like carbon films under high vacuum

2020 ◽  
Vol 52 (6) ◽  
pp. 339-347
Author(s):  
Renhui Zhang ◽  
Mingxue Shen ◽  
Zhongyi He
1996 ◽  
Vol 438 ◽  
Author(s):  
R. L. C. Wu ◽  
W. Lanter

AbstractAn ultra high vacuum ion beam system, consisting of a 20 cm diameter Rf excilted (13.56 MHz) ion gun and a four-axis substrate scanner, has been used to modify large surfaces (up to 1000 cm2) of various materials, including; infrared windows, silicon nitride, polycrystalline diamond, 304 and 316 stainless steels, 440C and M50 steels, aluminum alloys, and polycarbonates; by depositing different chemical compositions of diamond-like carbon films. The influences of ion energy, Rf power, gas composition (H2/CH4 , Ar/CH4 and O2/CH4/H2), on the diamond-like carbon characteristics has been studied. Particular attention was focused on adhesion, environmental effects, IR(3–12 μm) transmission, coefficient of friction, and wear factors under spacelike environments of diamond-like carbon films on various substrates. A quadrupole mass spectrometer was utilized to monitor the ion beam composition for quality control and process optimization.


2012 ◽  
Vol 63 (1) ◽  
pp. 35
Author(s):  
Shuji YAMAMOTO ◽  
Noriaki HIDAKA ◽  
Atsuo KAWANA ◽  
Chitoshi MASUDA

2003 ◽  
Vol 12 (9) ◽  
pp. 1517-1523 ◽  
Author(s):  
Se Jun Park ◽  
Jong-Kuk Kim ◽  
Kwang-Ryeol Lee ◽  
Dae-Hong Ko

1999 ◽  
Vol 352 (1-2) ◽  
pp. 145-150 ◽  
Author(s):  
Huiwen Liu ◽  
Akihiro Tanaka ◽  
Tai Kumagai

1999 ◽  
Vol 112 (1-3) ◽  
pp. 204-209 ◽  
Author(s):  
Myeong-Geun Kim ◽  
Kwang-Ryeol Lee ◽  
Kwang Yong Eun

Wear ◽  
2002 ◽  
Vol 252 (1-2) ◽  
pp. 70-79 ◽  
Author(s):  
Seung Ho Yang ◽  
Hosung Kong ◽  
Kwang-Ryeol Lee ◽  
Sejun Park ◽  
Dae Eun Kim

2013 ◽  
Vol 285 ◽  
pp. 645-648 ◽  
Author(s):  
R.P.C. Costa ◽  
D.A. Lima-Oliveira ◽  
F.R. Marciano ◽  
A.O. Lobo ◽  
E.J. Corat ◽  
...  

1995 ◽  
Vol 397 ◽  
Author(s):  
Ashok Kumar ◽  
R. B. Inturi ◽  
Y. Vohra ◽  
U. Ekanayake ◽  
N. Shu ◽  
...  

ABSTRACTDiamond-like carbon (DLC) films have a unique combination of physical and chemical properties such as high hardness, optical transparency, low coefficient of friction and chemical inertness. A pulsed laser (248 nm) has been used to ablate a pyrolytic graphite target to deposit DLC films on Si (100) and 7059 Corning glass substrates. The deposition was carried out in high vacuum (≤ 10−6 Torr) at different temperatures ranging from room temperature to 400°C. The films were characterized by x-ray diffraction, scanning electron microscope, and Raman spectroscopie techniques. The mechanical properties (hardness and Young's modulus) of these films were characterized by nanoindentation. We have found that the films deposited at room temperature and 100°C show the characteristic features of DLC films and have the better hardness and modulus properties compared to the films fabricated at higher temperatures, which transform into amorphous carbon. Correlations of pulsed laser deposition process parameters with the properties of deposited DLC films will be discussed in this paper.


Sign in / Sign up

Export Citation Format

Share Document