scholarly journals Ionization effects in molecular depth profiling of trehalose films using buckminsterfullerene (C60) cluster ions

2010 ◽  
Vol 43 (1-2) ◽  
pp. 99-102 ◽  
Author(s):  
C. Lu ◽  
A. Wucher ◽  
N. Winograd
Keyword(s):  
Depth Profiling ◽  
Cluster Ions ◽  
Molecular Depth Profiling ◽  
Buckminsterfullerene C60

scholarly journals Direct comparison of Au3+ and C60+ cluster projectiles in SIMS molecular depth profiling

2007 ◽  
Vol 18 (3) ◽  
pp. 406-412 ◽  
Author(s):  
Juan Cheng ◽  
Joseph Kozole ◽  
Robert Hengstebeck ◽  
Nicholas Winograd
Keyword(s):  
Depth Profiling ◽  
Molecular Depth Profiling

scholarly journals Numerical investigation of depth profiling capabilities of helium and neon ions in ion microscopy

2016 ◽  
Vol 7 ◽  
pp. 1749-1760 ◽  
Author(s):  
Patrick Philipp ◽  
Lukasz Rzeznik ◽  
Tom Wirtz
Keyword(s):  
3D Imaging ◽  
Secondary Ion Mass Spectrometry ◽  
Depth Profiling ◽  
Lateral Resolution ◽  
Cluster Ions ◽  
Depth Information ◽  
Preferential Sputtering ◽  
Atomic Mixing ◽  
Primary Ions ◽  
Ion Species

The analysis of polymers by secondary ion mass spectrometry (SIMS) has been a topic of interest for many years. In recent years, the primary ion species evolved from heavy monatomic ions to cluster and massive cluster primary ions in order to preserve a maximum of organic information. The progress in less-damaging sputtering goes along with a loss in lateral resolution for 2D and 3D imaging. By contrast the development of a mass spectrometer as an add-on tool for the helium ion microscope (HIM), which uses finely focussed He+ or Ne+ beams, allows for the analysis of secondary ions and small secondary cluster ions with unprecedented lateral resolution. Irradiation induced damage and depth profiling capabilities obtained with these light rare gas species have been far less investigated than ion species used classically in SIMS. In this paper we simulated the sputtering of multi-layered polymer samples using the BCA (binary collision approximation) code SD_TRIM_SP to study preferential sputtering and atomic mixing in such samples up to a fluence of 1018 ions/cm2. Results show that helium primary ions are completely inappropriate for depth profiling applications with this kind of sample materials while results for neon are similar to argon. The latter is commonly used as primary ion species in SIMS. For the two heavier species, layers separated by 10 nm can be distinguished for impact energies of a few keV. These results are encouraging for 3D imaging applications where lateral and depth information are of importance.

Molecular depth profiling of trehalose using a C60 cluster ion beam

2008 ◽  
Vol 255 (4) ◽  
pp. 959-961 ◽  
Author(s):  
Andreas Wucher ◽  
Juan Cheng ◽  
Nicholas Winograd
Keyword(s):  
Ion Beam ◽  
Depth Profiling ◽  
Molecular Depth Profiling ◽  
Cluster Ion

Investigations of molecular depth profiling with dual beam sputtering

2012 ◽  
Vol 45 (1) ◽  
pp. 175-177 ◽  
Author(s):  
C. Lu ◽  
A. Wucher ◽  
N. Winograd
Keyword(s):  
Depth Profiling ◽  
Dual Beam ◽  
Molecular Depth Profiling ◽  
Beam Sputtering

SIMS with highly excited primary beams for molecular depth profiling and imaging of organic and biological materials

2010 ◽  
Vol 42 (10-11) ◽  
pp. 1612-1615 ◽  
Author(s):  
Jiro Matsuo ◽  
Satoshi Ninomiya ◽  
Hideaki Yamada ◽  
Kazuya Ichiki ◽  
Yoshinobu Wakamatsu ◽  
...  
Keyword(s):  
Depth Profiling ◽  
Biological Materials ◽  
Molecular Depth Profiling

scholarly journals Investigating the fundamentals of molecular depth profiling using strong-field photoionization of sputtered neutrals

2010 ◽  
Vol 43 (1-2) ◽  
pp. 45-48 ◽  
Author(s):  
D. Willingham ◽  
D. A. Brenes ◽  
N. Winograd ◽  
A. Wucher
Keyword(s):  
Strong Field ◽  
Depth Profiling ◽  
Molecular Depth Profiling
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