Application of metal cluster complex ion beam for low damage sputtering

2005 ◽  
Vol 37 (2) ◽  
pp. 164-166 ◽  
Author(s):  
Toshiyuki Fujimoto ◽  
Takeshi Mizota ◽  
Hidehiko Nonaka ◽  
Akira Kurokawa ◽  
Shingo Ichimura
Keyword(s):  
Metal Cluster ◽  
Ion Beam ◽  
Cluster Complex ◽  
Complex Ion

Production of Stable Ion Beam of Os3(CO)12with Compact Metal-Cluster-Complex Ion Source

2006 ◽  
Vol 45 (7) ◽  
pp. 6000-6007 ◽  
Author(s):  
Yukio Fujiwara ◽  
Kouji Kondou ◽  
Yoshikazu Teranishi ◽  
Hidehiko Nonaka ◽  
Toshiyuki Fujimoto ◽  
...  
Keyword(s):  
Metal Cluster ◽  
Ion Beam ◽  
Ion Source ◽  
Cluster Complex ◽  
Complex Ion

scholarly journals Characteristics of a Metal-Cluster-Complex Ion Beam and Its Application to Secondary Ion Mass Spectrometry (SIMS)

Hyomen Kagaku ◽  
2010 ◽  
Vol 31 (11) ◽  
pp. 593-598
Author(s):  
Yukio FUJIWARA ◽  
Hidehiko NONAKA ◽  
Naoaki SAITO ◽  
Atsushi SUZUKI ◽  
Hiroshi ITOH ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Secondary Ion Mass Spectrometry ◽  
Metal Cluster ◽  
Ion Beam ◽  
Cluster Complex ◽  
Ion Mass Spectrometry ◽  
Secondary Ion ◽  
Complex Ion

Metal cluster complex primary ion beam source for secondary ion mass spectrometry (SIMS)

Vacuum ◽  
2009 ◽  
Vol 84 (5) ◽  
pp. 544-549 ◽  
Author(s):  
Yukio Fujiwara ◽  
Kouji Watanabe ◽  
Hidehiko Nonaka ◽  
Naoaki Saito ◽  
Atsushi Suzuki ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Secondary Ion Mass Spectrometry ◽  
Metal Cluster ◽  
Ion Beam ◽  
Cluster Complex ◽  
Beam Source ◽  
Ion Mass Spectrometry ◽  
Secondary Ion

Factorial analysis of cluster-SIMS depth profiling using metal-cluster-complex ion beams

2008 ◽  
Vol 255 (4) ◽  
pp. 1338-1340
Author(s):  
Yukio Fujiwara ◽  
Kouji Kondou ◽  
Kouji Watanabe ◽  
Hidehiko Nonaka ◽  
Naoaki Saito ◽  
...  
Keyword(s):  
Metal Cluster ◽  
Depth Profiling ◽  
Ion Beams ◽  
Factorial Analysis ◽  
Cluster Complex ◽  
Cluster Sims ◽  
Sims Depth Profiling ◽  
Complex Ion

scholarly journals Production and Applications of Metal-cluster-complex Ion Beams

2009 ◽  
Vol 52 (4) ◽  
pp. 231-236
Author(s):  
Yukio FUJIWARA ◽  
Kouji KONDOU ◽  
Yoshikazu TERANISHI ◽  
Kouji WATANABE ◽  
Hidehiko NONAKA ◽  
...  
Keyword(s):  
Metal Cluster ◽  
Ion Beams ◽  
Cluster Complex ◽  
Complex Ion

scholarly journals High depth resolution SIMS analysis using metal cluster complex ion bombardment

2008 ◽  
Vol 100 (1) ◽  
pp. 012001 ◽  
Author(s):  
M Tomita ◽  
T Kinno ◽  
M Koike ◽  
H Tanaka ◽  
S Takeno ◽  
...  
Keyword(s):  
Metal Cluster ◽  
Depth Resolution ◽  
Ion Bombardment ◽  
Cluster Complex ◽  
Sims Analysis ◽  
High Depth ◽  
Complex Ion

Secondary Ion Mass Spectrometry of Organic Thin Films Using Metal-Cluster-Complex Ion Source

2006 ◽  
Vol 45 (No. 36) ◽  
pp. L987-L990 ◽  
Author(s):  
Yukio Fujiwara ◽  
Kouji Kondou ◽  
Hidehiko Nonaka ◽  
Naoaki Saito ◽  
Hiroshi Itoh ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Thin Films ◽  
Secondary Ion Mass Spectrometry ◽  
Metal Cluster ◽  
Organic Thin Films ◽  
Ion Source ◽  
Cluster Complex ◽  
Ion Mass Spectrometry ◽  
Secondary Ion ◽  
Complex Ion

Beam-induced Nanoscale Ripple Formation on Silicon with the Metal-Cluster-Complex Ion of Ir4(CO)7+

2007 ◽  
Vol 46 (No. 35) ◽  
pp. L854-L857 ◽  
Author(s):  
Yukio Fujiwara ◽  
Kouji Kondou ◽  
Kouji Watanabe ◽  
Hidehiko Nonaka ◽  
Naoaki Saito ◽  
...  
Keyword(s):  
Metal Cluster ◽  
Cluster Complex ◽  
Ripple Formation ◽  
Complex Ion
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