Resolution limit for electron beam-induced deposition on thick substrates

Scanning ◽  
2006 ◽  
Vol 28 (4) ◽  
pp. 204-211 ◽  
Author(s):  
C. W. Hagen ◽  
N. Silvis-Cividjian ◽  
P. Kruit
Keyword(s):  
Electron Beam ◽  
Resolution Limit ◽  
Electron Beam Induced Deposition

Approaching the Resolution Limit of Nanometer-Scale Electron Beam-Induced Deposition

Nano Letters ◽  
2005 ◽  
Vol 5 (7) ◽  
pp. 1303-1307 ◽  
Author(s):  
Willem F. van Dorp ◽  
Bob van Someren ◽  
Cornelis W. Hagen ◽  
Pieter Kruit ◽  
Peter A. Crozier
Keyword(s):  
Electron Beam ◽  
Nanometer Scale ◽  
Resolution Limit ◽  
Electron Beam Induced Deposition

Annealing effect of platinum-incorporated nanowires created by focused ion/electron-beam-induced deposition

2014 ◽  
Vol 23 (8) ◽  
pp. 088111 ◽  
Author(s):  
Jing-Yue Fang ◽  
Shi-Qiao Qin ◽  
Xue-Ao Zhang ◽  
Dong-Qing Liu ◽  
Sheng-Li Chang
Keyword(s):  
Electron Beam ◽  
Annealing Effect ◽  
Electron Beam Induced Deposition

scholarly journals Synthesis of Nanostructures using Electron Beam Induced Deposition

2008 ◽  
Vol 14 (S2) ◽  
pp. 242-243
Author(s):  
P Kruit ◽  
W van Dorp ◽  
K Hagen ◽  
PA Crozier
Keyword(s):  
Electron Beam ◽  
New Mexico ◽  
Electron Beam Induced Deposition ◽  
Synthesis Of Nanostructures

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

scholarly journals A novel copper precursor for electron beam induced deposition

2018 ◽  
Vol 9 ◽  
pp. 1220-1227 ◽  
Author(s):  
Caspar Haverkamp ◽  
George Sarau ◽  
Mikhail N Polyakov ◽  
Ivo Utke ◽  
Marcos V Puydinger dos Santos ◽  
...  
Keyword(s):  
Electron Beam ◽  
Optical Transmission ◽  
Pure Copper ◽  
Dielectric Behavior ◽  
Copper Oxidation ◽  
Transmission Electron ◽  
Sum Formula ◽  
Electron Beam Induced Deposition ◽  
High Degree ◽  
Good Agreement

A fluorine free copper precursor, Cu(tbaoac)2 with the chemical sum formula CuC16O6H26 is introduced for focused electron beam induced deposition (FEBID). FEBID with 15 keV and 7 nA results in deposits with an atomic composition of Cu:O:C of approximately 1:1:2. Transmission electron microscopy proved that pure copper nanocrystals with sizes of up to around 15 nm were dispersed inside the carbonaceous matrix. Raman investigations revealed a high degree of amorphization of the carbonaceous matrix and showed hints for partial copper oxidation taking place selectively on the surfaces of the deposits. Optical transmission/reflection measurements of deposited pads showed a dielectric behavior of the material in the optical spectral range. The general behavior of the permittivity could be described by applying the Maxwell–Garnett mixing model to amorphous carbon and copper. The dielectric function measured from deposited pads was used to simulate the optical response of tip arrays fabricated out of the same precursor and showed good agreement with measurements. This paves the way for future plasmonic applications with copper-FEBID.

scholarly journals Direct writing of CoFe alloy nanostructures by focused electron beam induced deposition from a heteronuclear precursor

2015 ◽  
Vol 26 (47) ◽  
pp. 475701 ◽  
Author(s):  
F Porrati ◽  
M Pohlit ◽  
J Müller ◽  
S Barth ◽  
F Biegger ◽  
...  
Keyword(s):  
Electron Beam ◽  
Direct Writing ◽  
Alloy Nanostructures ◽  
Electron Beam Induced Deposition

scholarly journals Surface excitations in the modelling of electron transport for electron-beam-induced deposition experiments

2015 ◽  
Vol 6 ◽  
pp. 1260-1267 ◽  
Author(s):  
Francesc Salvat-Pujol ◽  
Roser Valentí ◽  
Wolfgang S Werner
Keyword(s):  
Electron Beam ◽  
Electron Transport ◽  
Primary Energy ◽  
Primary Electron ◽  
Sizeable Fraction ◽  
The Subject ◽  
Electron Beam Induced Deposition ◽  
The One ◽  
Electron Energy Loss ◽  
General Perspective

The aim of the present overview article is to raise awareness of an essential aspect that is usually not accounted for in the modelling of electron transport for focused-electron-beam-induced deposition (FEBID) of nanostructures: Surface excitations are on the one hand responsible for a sizeable fraction of the intensity in reflection-electron-energy-loss spectra for primary electron energies of up to a few kiloelectronvolts and, on the other hand, they play a key role in the emission of secondary electrons from solids, regardless of the primary energy. In this overview work we present a general perspective of recent works on the subject of surface excitations and on low-energy electron transport, highlighting the most relevant aspects for the modelling of electron transport in FEBID simulations.

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