A nonlinear model predictive control approach for robust end-point property control of a thin-film deposition process

2007 ◽  
Vol 17 (17) ◽  
pp. 1600-1613 ◽  
Author(s):  
Zoltán K. Nagy ◽  
Frank Allgöwer
Keyword(s):  
Thin Film ◽  
Predictive Control ◽  
Nonlinear Model ◽  
Thin Film Deposition ◽  
Deposition Process ◽  
Film Deposition ◽  
Nonlinear Model Predictive Control ◽  
Point Property ◽  
Control Approach ◽  
Property Control

Predictive control of surface mean slope and roughness in a thin film deposition process

2010 ◽  
Vol 65 (16) ◽  
pp. 4720-4731 ◽  
Author(s):  
Xinyu Zhang ◽  
Gangshi Hu ◽  
Gerassimos Orkoulas ◽  
Panagiotis D. Christofides
Keyword(s):  
Thin Film ◽  
Predictive Control ◽  
Thin Film Deposition ◽  
Deposition Process ◽  
Film Deposition

Statistical Process Control Based Supervisory Generalized Predictive Control of Thin Film Deposition Processes

2004 ◽  
Vol 128 (1) ◽  
pp. 315-325 ◽  
Author(s):  
Jionghua Jin ◽  
Huairui Guo ◽  
Shiyu Zhou
Keyword(s):  
Thin Film ◽  
Process Control ◽  
Statistical Process Control ◽  
Predictive Control ◽  
Thin Film Deposition ◽  
Deposition Process ◽  
Film Deposition ◽  
Generalized Predictive Control ◽  
Statistical Process ◽  
Production Run

This paper presents a supervisory generalized predictive control (GPC) by combining GPC with statistical process control (SPC) for the control of the thin film deposition process. In the supervised GPC, the deposition process is described as an ARMAX model for each production run and GPC is applied to the in situ thickness-sensing data for thickness control. Supervisory strategies, developed from SPC techniques, are used to monitor process changes and estimate the disturbance magnitudes during production. Based on the SPC monitoring results, different supervisory strategies are used to revise the disturbance models and the control law in the GPC to achieve a satisfactory control performance. A case study is provided to demonstrate the developed methodology.

Spray Pyrolysis Thin Film Deposition Technique for Micro-Sensors and Devices

2020 ◽  
pp. 178-202
Author(s):  
Monoj Kumar Singha ◽  
Vineet Rojwal
Keyword(s):  
Thin Film ◽  
Spray Pyrolysis ◽  
Thin Film Deposition ◽  
Deposition Process ◽  
Film Deposition ◽  
Deposition Technique ◽  
Uv Photodetector ◽  
Spray Process ◽  
Spray Pyrolysis Deposition ◽  
Deposition Techniques

Thin film is used for sensing and electronic devices applications. Various techniques are used for thin film deposition. This chapter presents the Spray pyrolysis deposition technique used for the growth of thin films sensing and device material. Spray pyrolysis is an inexpensive method to grow good crystalline thin film compared to other thin film deposition techniques. The chapter gives an overview of the spray process used for thin film deposition. Basic setup for this process is explained. Parameters affecting the deposition process is explained, as are the various spray methods. Finally, some examples of spray pyrolysis in different applications like a gas sensor, UV photodetector, solar cell, photocatalysis, and supercapacitor are discussed.

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