Electrical Properties of ZrO2
/Al2
O3
/ZrO2
-Based Capacitors with TiN, Ru, and TiN/Ru Top Electrode Materials
2018 ◽
Vol 12
(10)
◽
pp. 1800356
◽
2011 ◽
Vol 50
(9S2)
◽
pp. 09NC06
◽
2011 ◽
Vol 2011
◽
pp. 1-7
◽
1992 ◽
Vol 52
(1-3)
◽
pp. 79-91
◽
Keyword(s):
2011 ◽
Vol 50
(9)
◽
pp. 09NC06
◽
2012 ◽
Vol 7
(10)
◽
pp. P10003-P10003
◽
2019 ◽
Vol 247
◽
pp. 114384
◽