Polishing and characterization of thick AlN layers grown on SiC substrates by stress control hydride vapor phase epitaxy

2006 ◽  
Vol 3 (6) ◽  
pp. 1448-1452 ◽  
Author(s):  
H. Mank ◽  
B. Amstatt ◽  
D. Turover ◽  
E. Bellet-Amalric ◽  
B. Daudin ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Hydride Vapor Phase Epitaxy ◽  
Stress Control

Characterization of free-standing GaN substrate grown through hydride vapor phase epitaxy with a TiN interlayer

2007 ◽  
Vol 253 (18) ◽  
pp. 7423-7428 ◽  
Author(s):  
T.B. Wei ◽  
R.F. Duan ◽  
J.X. Wang ◽  
J.M. Li ◽  
Z.Q. Huo ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Hydride Vapor Phase Epitaxy ◽  
Free Standing

Growth and characterization of low defect GaN by hydride vapor phase epitaxy

2002 ◽  
Vol 246 (3-4) ◽  
pp. 223-229 ◽  
Author(s):  
Xueping Xu ◽  
R.P Vaudo ◽  
C Loria ◽  
A Salant ◽  
G.R Brandes ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Hydride Vapor Phase Epitaxy

Characterization of the Nonpolar GaN Substrate Obtained by Multistep Regrowth by Hydride Vapor Phase Epitaxy

2011 ◽  
Vol 5 (1) ◽  
pp. 011001 ◽  
Author(s):  
Henryk Teisseyre ◽  
Jaroslaw Zbigniew Domagala ◽  
Boleslaw Lucznik ◽  
Anna Reszka ◽  
Bogdan Jerzy Kowalski ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Hydride Vapor Phase Epitaxy ◽  
Nonpolar Gan

Characterization of a freestanding AlN substrate prepared by hydride vapor phase epitaxy

2008 ◽  
Vol 5 (6) ◽  
pp. 1512-1514 ◽  
Author(s):  
Y. Kumagai ◽  
T. Nagashima ◽  
H. Murakami ◽  
K. Takada ◽  
A. Koukitu
Keyword(s):  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Hydride Vapor Phase Epitaxy

Characterization of AlGaN, Te-doped GaN and Mg-doped GaN grown by hydride vapor phase epitaxy

2007 ◽  
Vol 4 (1) ◽  
pp. 133-136 ◽  
Author(s):  
K. S. Jang ◽  
K. H. Kim ◽  
S. L. Hwang ◽  
H. S. Jeon ◽  
H. S. Ahn ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Hydride Vapor Phase Epitaxy ◽  
Mg Doped

Characterization of Epilayers in Vertical Light-Emitting Diode Grown by Mixed-Source Hydride Vapor Phase Epitaxy

2020 ◽  
Vol 70 (4) ◽  
pp. 315-321
Author(s):  
Kyoung Hwa KIM ◽  
Gang Seok LEE ◽  
Hyung Soo AHN* ◽  
Injun JEON ◽  
Chae Ryong CHO ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Light Emitting Diode ◽  
Vapor Phase Epitaxy ◽  
Hydride Vapor Phase Epitaxy ◽  
Light Emitting
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