Preparation and physical properties of transparent conducting oxide films

1982 ◽  
Vol 71 (1) ◽  
pp. 13-41 ◽  
Author(s):  
Z. M. Jarzebski
Keyword(s):  
Physical Properties ◽  
Transparent Conducting Oxide ◽  
Oxide Films ◽  
Transparent Conducting

Nanostructured Transparent Conducting Oxide Films for Polarization Control with Plasmonic Metasurfaces

CLEO: 2014 ◽  
2014 ◽  
Author(s):  
Jongbum Kim ◽  
Yang Zhao ◽  
Aveek Dutta ◽  
Sajid M. Choudhury ◽  
Alexander V. Kildishev ◽  
...  
Keyword(s):  
Transparent Conducting Oxide ◽  
Oxide Films ◽  
Polarization Control ◽  
Transparent Conducting

Properties of multilayer transparent conducting oxide films

2004 ◽  
Vol 461 (2) ◽  
pp. 309-315 ◽  
Author(s):  
E.J.J Martin ◽  
M Yan ◽  
M Lane ◽  
J Ireland ◽  
C.R Kannewurf ◽  
...  
Keyword(s):  
Transparent Conducting Oxide ◽  
Oxide Films ◽  
Transparent Conducting

Atomic Layer Deposition of Gallium-Doped Zinc Oxide Transparent Conducting Oxide films

2011 ◽  
Vol 1315 ◽  
Author(s):  
Paul R. Chalker ◽  
Paul A. Marshall ◽  
Simon Romani ◽  
Matthew J. Rosseinsky ◽  
Simon Rushworth ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Atomic Layer Deposition ◽  
Film Thickness ◽  
Transparent Conducting Oxide ◽  
Oxide Films ◽  
Atomic Layer ◽  
Contactless Measurement ◽  
Zinc Oxide Films ◽  
Transparent Conducting ◽  
Layer Deposition

ABSTRACTThin transparent conducting oxide (TCO) films of gallium-doped zinc oxide have been deposited on glass substrates by atomic layer deposition (ALD) using diethyl zinc, triethyl gallium and water vapour as precursors. The gallium-doped zinc oxide films were deposited over the temperature range 100-350°C. Transmission electron microscopy reveals that the as-deposited films are polycrystalline in character. The electrical resistivity of the gallium-doped zinc oxide films was evaluated using four-point probe and contactless measurement methods as a function of film thickness. The lowest sheet resistance of 16 Ω/☐ was measured from a film thickness of 400nm and a gallium content of 5 atomic percent. The electron Hall mobility of this film was 12.3 cm2/Vs. The visible transmittance of the films was 78% with a haze of 0.2%.

Sign in / Sign up

Export Citation Format

Share Document