On cluster mobilities in nucleation and growth processes of epitaxial thin films

1979 ◽  
Vol 55 (2) ◽  
pp. 353-367 ◽  
Author(s):  
G. Honjo ◽  
K. Takayanagi ◽  
K. Kobayashi ◽  
K. Yagi
1995 ◽  
Vol 399 ◽  
Author(s):  
M.C. Bartelt ◽  
J.W. Evans

ABSTRACTWe model kinetic roughening during Fe(100) homoepitaxy, where the formation of mounds with selected slope has been observed. Our model incorporates irreversible nucleation and growth of two-dimensional square islands in each layer, and a step-edge barrier to diffusive downward transport (which exceeds the barrier, Ed, to terrace diffusion by ESch). We estimate that ESch≈45meV compared with Ed≈450meV. To reproduce observed behavior, it is also essential for the model to incorporate "downward funneling" of depositing atoms to four-fold hollow adsorption sites, as this controls slope selection. Finally, we discuss model predictions for the non-monotonic temperature dependence of kinetic roughening.


Author(s):  
J.A. Eades ◽  
E. Grünbaum

In the last decade and a half, thin film research, particularly research into problems associated with epitaxy, has developed from a simple empirical process of determining the conditions for epitaxy into a complex analytical and experimental study of the nucleation and growth process on the one hand and a technology of very great importance on the other. During this period the thin films group of the University of Chile has studied the epitaxy of metals on metal and insulating substrates. The development of the group, one of the first research groups in physics to be established in the country, has parallelled the increasing complexity of the field.The elaborate techniques and equipment now needed for research into thin films may be illustrated by considering the plant and facilities of this group as characteristic of a good system for the controlled deposition and study of thin films.


Author(s):  
S.K. Streiffer ◽  
C.B. Eom ◽  
J.C. Bravman ◽  
T.H. Geballet

The study of very thin (<15 nm) YBa2Cu3O7−δ (YBCO) films is necessary both for investigating the nucleation and growth of films of this material and for achieving a better understanding of multilayer structures incorporating such thin YBCO regions. We have used transmission electron microscopy to examine ultra-thin films grown on MgO substrates by single-target, off-axis magnetron sputtering; details of the deposition process have been reported elsewhere. Briefly, polished MgO substrates were attached to a block placed at 90° to the sputtering target and heated to 650 °C. The sputtering was performed in 10 mtorr oxygen and 40 mtorr argon with an rf power of 125 watts. After deposition, the chamber was vented to 500 torr oxygen and allowed to cool to room temperature. Because of YBCO’s susceptibility to environmental degradation and oxygen loss, the technique of Xi, et al. was followed and a protective overlayer of amorphous YBCO was deposited on the just-grown films.


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