Fabrication and Characterization of (100)‐Oriented Single‐Crystal Diamond p–i–n Junction Ultraviolet Detector

2020 ◽  
Vol 217 (21) ◽  
pp. 2000207
Author(s):  
Zhangcheng Liu ◽  
Fang Lin ◽  
Dan Zhao ◽  
Tai Min ◽  
Hongxing Wang
Keyword(s):  
Single Crystal ◽  
Ultraviolet Detector ◽  
Single Crystal Diamond ◽  
Fabrication And Characterization ◽  
Oriented Single Crystal

scholarly journals Fabrication and Characterization of Single-Crystal Diamond Membranes for Quantum Photonics with Tunable Microcavities

Micromachines ◽  
2020 ◽  
Vol 11 (12) ◽  
pp. 1080
Author(s):  
Julia Heupel ◽  
Maximilian Pallmann ◽  
Jonathan Körber ◽  
Rolf Merz ◽  
Michael Kopnarski ◽  
...  
Keyword(s):  
Surface Roughness ◽  
Single Crystal ◽  
Membrane Thickness ◽  
Initial Surface ◽  
Crucial Component ◽  
Single Crystal Diamond ◽  
Fabrication And Characterization ◽  
Etching Parameters ◽  
Quantum Photonics

The development of quantum technologies is one of the big challenges in modern research. A crucial component for many applications is an efficient, coherent spin–photon interface, and coupling single-color centers in thin diamond membranes to a microcavity is a promising approach. To structure such micrometer thin single-crystal diamond (SCD) membranes with a good quality, it is important to minimize defects originating from polishing or etching procedures. Here, we report on the fabrication of SCD membranes, with various diameters, exhibiting a low surface roughness down to 0.4 nm on a small area scale, by etching through a diamond bulk mask with angled holes. A significant reduction in pits induced by micromasking and polishing damages was accomplished by the application of alternating Ar/Cl2 + O2 dry etching steps. By a variation of etching parameters regarding the Ar/Cl2 step, an enhanced planarization of the surface was obtained, in particular, for surfaces with a higher initial surface roughness of several nanometers. Furthermore, we present the successful bonding of an SCD membrane via van der Waals forces on a cavity mirror and perform finesse measurements which yielded values between 500 and 5000, depending on the position and hence on the membrane thickness. Our results are promising for, e.g., an efficient spin–photon interface.

scholarly journals Fabrication and electrical characterization of three-dimensional graphitic microchannels in single crystal diamond

2012 ◽  
Vol 14 (5) ◽  
pp. 053011 ◽  
Author(s):  
F Picollo ◽  
D Gatto Monticone ◽  
P Olivero ◽  
B A Fairchild ◽  
S Rubanov ◽  
...  
Keyword(s):  
Single Crystal ◽  
Three Dimensional ◽  
Electrical Characterization ◽  
Single Crystal Diamond

scholarly journals Reflection/transmission confocal microscopy characterization of single-crystal diamond microlens arrays

2004 ◽  
Vol 84 (15) ◽  
pp. 2754-2756 ◽  
Author(s):  
E. Gu ◽  
H. W. Choi ◽  
C. Liu ◽  
C. Griffin ◽  
J. M. Girkin ◽  
...  
Keyword(s):  
Confocal Microscopy ◽  
Single Crystal ◽  
Microlens Arrays ◽  
Single Crystal Diamond ◽  
Microscopy Characterization

scholarly journals Characterization of a single crystal diamond pixel detector in a high energy particle beam

2008 ◽  
Vol 3 (12) ◽  
pp. P12002-P12002 ◽  
Author(s):  
M Mathes ◽  
M Cristinziani ◽  
H Kagan ◽  
S Smith ◽  
W Trischuk ◽  
...  
Keyword(s):  
Single Crystal ◽  
Particle Beam ◽  
High Energy ◽  
High Energy Particle ◽  
Pixel Detector ◽  
Energy Particle ◽  
Single Crystal Diamond

Fabrication and characterization of transparent conductive Sn-doped β-Ga2O3 single crystal

2007 ◽  
Vol 4 (7) ◽  
pp. 2310-2313 ◽  
Author(s):  
N. Suzuki ◽  
S. Ohira ◽  
M. Tanaka ◽  
T. Sugawara ◽  
K. Nakajima ◽  
...  
Keyword(s):  
Single Crystal ◽  
Fabrication And Characterization

scholarly journals (111)-oriented, single crystal diamond tips for nanoscale scanning probe imaging of out-of-plane magnetic fields

2019 ◽  
Vol 115 (19) ◽  
pp. 192401 ◽  
Author(s):  
D. Rohner ◽  
J. Happacher ◽  
P. Reiser ◽  
M. A. Tschudin ◽  
A. Tallaire ◽  
...  
Keyword(s):  
Magnetic Fields ◽  
Single Crystal ◽  
Scanning Probe ◽  
Single Crystal Diamond ◽  
Out Of Plane ◽  
Oriented Single Crystal
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