Nonvertical Sidewall Angle Influence on the Efficiency of Diamond‐on‐Insulator Grating Couplers

2019 ◽  
Vol 216 (21) ◽  
pp. 1900271
Author(s):  
Sergey Yu. Troschiev ◽  
Sergei D. Trofimov ◽  
Sergey A. Tarelkin ◽  
Anton V. Golovanov ◽  
Nikolay V. Luparev ◽  
...  
Keyword(s):  
Grating Couplers ◽  
Sidewall Angle

scholarly journals Biaxial 360-degree scanning LIDAR using a liquid crystal control

2021 ◽  
Vol 11 (1) ◽  
Author(s):  
Seiji Nishiwaki
Keyword(s):  
Liquid Crystal ◽  
Laser Light ◽  
Side Surface ◽  
Parallel Beam ◽  
Grating Couplers ◽  
Autonomous Cars ◽  
Scanning Lidar ◽  
Center Axis ◽  
Circular Grating ◽  
Segmented Electrode

AbstractSophisticated non-mechanical technology for LIDARs is needed to realize safe autonomous cars. We have confirmed the operating principle of a non-mechanical LIDAR by combining concentric circular-grating couplers (CGCs) with a coaxially aligned rod lens. Laser light incident vertically on the center of the inner CGC along the center axis of the lens is radiated from the outer CGC and passes through the side surface of the lens. It is converted to a parallel beam that scans in two axes by applying voltages to two area-segmented electrode layers sandwiching the CGCs and a liquid crystal layer formed on the CGCs. We have demonstrated scanning whose motion ranges were 360 degrees horizontally and 10° vertically. A beam with a spread angle of 0.3° × 0.8° at a minimum swept vertically up to a frequency of 100 Hz and ten equally spaced beams scanned rotationally with a 6-degree cycle variation of spread of between 0.8° and 3.5°.

The sidewall angle dependence of CDSEM measurements and its impact on CD process control

2005 ◽  
Author(s):  
Justin J. Hwu ◽  
Homayoun Kiamanesh ◽  
Sukhbir Dulay ◽  
Peter Wilkens
Keyword(s):  
Process Control ◽  
Angle Dependence ◽  
Sidewall Angle

Air-Suspended SU-8 Polymer Waveguide Grating Couplers

2016 ◽  
Vol 34 (17) ◽  
pp. 3966-3971 ◽  
Author(s):  
Christoph Prokop ◽  
Steffen Schoenhardt ◽  
Bert Laegel ◽  
Sandra Wolff ◽  
Arnan Mitchell ◽  
...  
Keyword(s):  
Grating Couplers ◽  
Waveguide Grating ◽  
Polymer Waveguide

scholarly journals Optimising apodized grating couplers in a pure SOI platform to −05 dB coupling efficiency

2015 ◽  
Vol 23 (12) ◽  
pp. 16289 ◽  
Author(s):  
Angelo Bozzola ◽  
Lee Carroll ◽  
Dario Gerace ◽  
Ilaria Cristiani ◽  
Lucio Claudio Andreani
Keyword(s):  
Coupling Efficiency ◽  
Grating Couplers

Gaussian beams from variable groove depth grating couplers in planar waveguides

1993 ◽  
Vol 32 (12) ◽  
pp. 2112 ◽  
Author(s):  
Keith A. Bates ◽  
Lifeng Li ◽  
Ronald L. Roncone ◽  
James J. Burke
Keyword(s):  
Groove Depth ◽  
Planar Waveguides ◽  
Gaussian Beams ◽  
Grating Couplers

scholarly journals Breaking the Coupling Efficiency–Bandwidth Trade‐Off in Surface Grating Couplers Using Zero‐Order Radiation

2021 ◽  
pp. 2000542
Author(s):  
Alejandro Sánchez‐Postigo ◽  
Robert Halir ◽  
J. Gonzalo Wangüemert‐Pérez ◽  
Alejandro Ortega‐Moñux ◽  
Shurui Wang ◽  
...  
Keyword(s):  
Coupling Efficiency ◽  
Zero Order ◽  
Grating Couplers ◽  
Trade Off ◽  
Surface Grating

Integrated-Optic Displacement Sensor Using a Pair of Grating Couplers

1995 ◽  
pp. 355-362
Author(s):  
Shogo Ura ◽  
Toshiaki Suhara ◽  
Hiroshi Nishihara
Keyword(s):  
Displacement Sensor ◽  
Grating Couplers
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