Laser-induced front side etching of fused silica with KrF excimer laser using thin chromium layers

2012 ◽  
Vol 209 (6) ◽  
pp. 1114-1118 ◽  
Author(s):  
Pierre Lorenz ◽  
Martin Ehrhardt ◽  
Klaus Zimmer
Keyword(s):  
Excimer Laser ◽  
Fused Silica ◽  
Front Side ◽  
Thin Chromium ◽  
Krf Excimer Laser

Laser-induced front side etching of fused silica with XeF excimer laser using thin metal layers

2012 ◽  
Vol 258 (23) ◽  
pp. 9138-9142 ◽  
Author(s):  
Pierre Lorenz ◽  
Martin Ehrhardt ◽  
Anja Wehrmann ◽  
Klaus Zimmer
Keyword(s):  
Excimer Laser ◽  
Fused Silica ◽  
Thin Metal ◽  
Front Side ◽  
Metal Layers

Laser-induced front side etching of CaF2 crystals with KrF excimer laser

2013 ◽  
Vol 265 ◽  
pp. 648-652 ◽  
Author(s):  
Pierre Lorenz ◽  
Martin Ehrhardt ◽  
Klaus Zimmer
Keyword(s):  
Excimer Laser ◽  
Front Side ◽  
Krf Excimer Laser

KrF-excimer-laser-induced absorption and fluorescence bands in fused silica related to the manufacturing process

1990 ◽  
Author(s):  
Norbert Leclerc ◽  
Christoph Pfleiderer ◽  
Hermine Hitzler ◽  
Stephan Thomas ◽  
Ralf Takke ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Manufacturing Process ◽  
Fused Silica ◽  
Induced Absorption ◽  
Krf Excimer Laser

Characterization of fused silica ablation by F 2 -KrF excimer laser multiwavelength excitation process

2002 ◽  
Author(s):  
Kotaro Obata ◽  
Koji Sugioka ◽  
Toshimitsu Akane ◽  
Naoko Aoki ◽  
Koichi Toyoda ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Fused Silica ◽  
Excitation Process ◽  
Krf Excimer Laser

Effects of glass forming conditions on the KrF-excimer-laser-induced optical damage in synthetic fused silica

1996 ◽  
Vol 203 ◽  
pp. 69-77 ◽  
Author(s):  
D.R. Sempolinski ◽  
T.P. Seward ◽  
C. Smith ◽  
N. Borrelli ◽  
C. Rosplock
Keyword(s):  
Excimer Laser ◽  
Fused Silica ◽  
Optical Damage ◽  
Glass Forming ◽  
Krf Excimer Laser
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