Machine Learning with Explainable Artificial Intelligence Vision for Characterization of Solution Conductivity Using Optical Emission Spectroscopy of Plasma in Aqueous Solution

2021 ◽  
Author(s):  
Ching‐Yu Wang ◽  
Tsung‐Shun Ko ◽  
Cheng‐Che Hsu
Keyword(s):  
Artificial Intelligence ◽  
Machine Learning ◽  
Aqueous Solution ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Explainable Artificial Intelligence ◽  
Solution Conductivity

scholarly journals Machine Learning Prediction of Electron Density and Temperature from Optical Emission Spectroscopy in Nitrogen Plasma

Coatings ◽  
2021 ◽  
Vol 11 (10) ◽  
pp. 1221
Author(s):  
Jun-Hyoung Park ◽  
Ji-Ho Cho ◽  
Jung-Sik Yoon ◽  
Jung-Ho Song
Keyword(s):  
Machine Learning ◽  
Electron Temperature ◽  
Real Time ◽  
Electron Density ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Plasma Parameters ◽  
Plasma Nitridation

We present a non-invasive approach for monitoring plasma parameters such as the electron temperature and density inside a radio-frequency (RF) plasma nitridation device using optical emission spectroscopy (OES) in conjunction with multivariate data analysis. Instead of relying on a theoretical model of the plasma emission to extract plasma parameters from the OES, an empirical correlation was established on the basis of simultaneous OES and other diagnostics. Additionally, we developed a machine learning (ML)-based virtual metrology model for real-time Te and ne monitoring in plasma nitridation processes using an in situ OES sensor. The results showed that the prediction accuracy of electron density was 97% and that of electron temperature was 90%. This method is especially useful in plasma processing because it provides in-situ and real-time analysis without disturbing the plasma or interfering with the process.

Applicability of optical emission spectroscopy techniques for characterization of Ar and Ar/O2 discharges

2021 ◽  
Vol 54 (27) ◽  
pp. 275203
Author(s):  
M Nikolić ◽  
I Sepulveda ◽  
C Gonzalez ◽  
N Khogeer ◽  
M Fernandez-Monteith
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission

Experimental characterization of argon/air mixture microwave plasmas using optical emission spectroscopy

2020 ◽  
Vol 370 ◽  
pp. 111278 ◽  
Author(s):  
Sébastien Rassou ◽  
Alain Piquemal ◽  
Nofel Merbahi ◽  
Fréderic Marchal ◽  
Mohammed Yousfi
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Experimental Characterization ◽  
Microwave Plasmas

Optical emission spectroscopy characterization of oxygen plasma during degradation of Escherichia coli

2007 ◽  
Vol 101 (10) ◽  
pp. 103305 ◽  
Author(s):  
D. Vujošević ◽  
M. Mozetič ◽  
U. Cvelbar ◽  
N. Krstulović ◽  
S. Milošević
Keyword(s):  
Escherichia Coli ◽  
Emission Spectroscopy ◽  
Oxygen Plasma ◽  
Optical Emission Spectroscopy ◽  
Optical Emission
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