Highly Conductive Cu Thin Film Deposition on Polyimide by RF-Driven Atmospheric Pressure Plasma Jets under Nitrogen Atmosphere

2015 ◽  
Vol 12 (5) ◽  
pp. 431-438 ◽  
Author(s):  
Peng Zhao ◽  
Wei Zheng ◽  
Jun Watanabe ◽  
Yue Dong Meng ◽  
Masaaki Nagatsu
Keyword(s):  
Thin Film ◽  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Thin Film Deposition ◽  
Nitrogen Atmosphere ◽  
Plasma Jets ◽  
Film Deposition ◽  
Pressure Plasma ◽  
Cu Thin Film

Low-Temperature Atmospheric-Pressure-Plasma Jet for Thin-Film Deposition

2009 ◽  
Vol 37 (7) ◽  
pp. 1127-1128 ◽  
Author(s):  
Chun Huang ◽  
Wen-Tung Hsu ◽  
Chi-Hung Liu ◽  
Shin-Yi Wu ◽  
Shih-Hsien Yang ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Plasma Jet ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Atmospheric Pressure Plasma Jet ◽  
Pressure Plasma

scholarly journals Atmospheric Pressure Plasma Deposition of Organosilicon Thin Films by Direct Current and Radio-frequency Plasma Jets

Materials ◽  
2020 ◽  
Vol 13 (6) ◽  
pp. 1296
Author(s):  
Iryna Kuchakova ◽  
Maria Daniela Ionita ◽  
Eusebiu-Rosini Ionita ◽  
Andrada Lazea-Stoyanova ◽  
Simona Brajnicov ◽  
...  
Keyword(s):  
Thin Films ◽  
Atmospheric Pressure ◽  
Plasma Deposition ◽  
Atmospheric Pressure Plasma ◽  
Polymeric Materials ◽  
Thin Film Deposition ◽  
Plasma Jets ◽  
Film Deposition ◽  
Rf Plasma ◽  
Pressure Plasma

Thin film deposition with atmospheric pressure plasmas is highly interesting for industrial demands and scientific interests in the field of biomaterials. However, the engineering of high-quality films by high-pressure plasmas with precise control over morphology and surface chemistry still poses a challenge. The two types of atmospheric-pressure plasma depositions of organosilicon films by the direct and indirect injection of hexamethyldisiloxane (HMDSO) precursor into a plasma region were chosen and compared in terms of the films chemical composition and morphology to address this. Although different methods of plasma excitation were used, the deposition of inorganic films with above 98% of SiO2 content was achieved for both cases. The chemical structure of the films was insignificantly dependent on the substrate type. The deposition in the afterglow of the DC discharge resulted in a soft film with high roughness, whereas RF plasma deposition led to a smoother film. In the case of the RF plasma deposition on polymeric materials resulted in films with delamination and cracks formation. Lastly, despite some material limitations, both deposition methods demonstrated significant potential for SiOx thin-films preparation for a variety of bio-related substrates, including glass, ceramics, metals, and polymers.

Thin film deposition method for ZnO nanosheets using low-temperature microwave-excited atmospheric pressure plasma jet

2019 ◽  
Vol 674 ◽  
pp. 58-63 ◽  
Author(s):  
Md. Shahiduzzaman ◽  
Ryosuke Yamada ◽  
Tatsuki Chikamatsu ◽  
Tsunehisa Ono ◽  
Yasunori Tanaka ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Plasma Jet ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Atmospheric Pressure Plasma Jet ◽  
Deposition Method ◽  
Zno Nanosheets

scholarly journals Cold atmospheric pressure plasma jets as sources of singlet delta oxygen for biomedical applications

2011 ◽  
Vol 109 (12) ◽  
pp. 123302 ◽  
Author(s):  
J. S. Sousa ◽  
K. Niemi ◽  
L. J. Cox ◽  
Q. Th. Algwari ◽  
T. Gans ◽  
...  
Keyword(s):  
Atmospheric Pressure ◽  
Biomedical Applications ◽  
Atmospheric Pressure Plasma ◽  
Plasma Jets ◽  
Pressure Plasma ◽  
Cold Atmospheric Pressure Plasma

Enhanced Long-Term Color Stability of Teeth Treated with Hydrogen Peroxide and Non-Thermal Atmospheric Pressure Plasma Jets

2014 ◽  
Vol 11 (11) ◽  
pp. 1010-1017 ◽  
Author(s):  
Seoul Hee Nam ◽  
Hyun Wook Lee ◽  
Jin Woo Hong ◽  
Hae June Lee ◽  
Gyoo Cheon Kim
Keyword(s):  
Hydrogen Peroxide ◽  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Color Stability ◽  
Plasma Jets ◽  
Pressure Plasma
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