Pressure Effect on the Velocity and Flux Distributions of Sputtered Metal Species in Magnetron Discharge Measured by Space-Resolved Tunable Diode Laser Induced Fluorescence

2009 ◽  
Vol 6 (S1) ◽  
pp. S326-S330 ◽  
Author(s):  
Catalin Vitelaru ◽  
Ludovic de Poucques ◽  
Tereza Hytkova ◽  
Tiberiu M. Minea ◽  
Caroline Boisse-Laporte ◽  
...  
Keyword(s):  
Diode Laser ◽  
Pressure Effect ◽  
Laser Induced Fluorescence ◽  
Tunable Diode Laser ◽  
Metal Species ◽  
Magnetron Discharge

Tunable diode-laser induced fluorescence on Al and Ti atoms in low pressure magnetron discharges

2010 ◽  
Vol 43 (12) ◽  
pp. 124013 ◽  
Author(s):  
C Vitelaru ◽  
C Aniculaesei ◽  
L de Poucques ◽  
T M Minea ◽  
C Boisse-Laporte ◽  
...  
Keyword(s):  
Diode Laser ◽  
Low Pressure ◽  
Laser Induced Fluorescence ◽  
Tunable Diode Laser

Xenon ion laser-induced fluorescence using a visible tunable diode laser near 680nm

2007 ◽  
Vol 78 (11) ◽  
pp. 116105 ◽  
Author(s):  
Greg Severn ◽  
Dongsoo Lee ◽  
Noah Hershkowitz
Keyword(s):  
Diode Laser ◽  
Laser Induced Fluorescence ◽  
Tunable Diode Laser ◽  
Ion Laser
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