Characterization of energetic and thermalized sputtered atoms in pulsed plasma using time-resolved tunable diode-laser induced fluorescence
Keyword(s):
Keyword(s):
1988 ◽
Vol 92
(18)
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pp. 5147-5150
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Keyword(s):
2012 ◽
Vol 21
(2)
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pp. 025010
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