Aging of Plasma-Deposited Films Prepared from Organic Monomers

2007 ◽  
Vol 4 (S1) ◽  
pp. S784-S789 ◽  
Author(s):  
Sufal Swaraj ◽  
Umut Oran ◽  
Andreas Lippitz ◽  
Jörg F. Friedrich ◽  
Wolfgang E. S. Unger
Keyword(s):  
Plasma Deposited Films ◽  
Deposited Films

Electronic properties of plasma-deposited films prepared from tetramethylsilane

1992 ◽  
Vol 209 (2) ◽  
pp. 250-258 ◽  
Author(s):  
J. Tyczkowski ◽  
E. Odrobina ◽  
P. Kazimierski ◽  
H. Bässler ◽  
A. Kisiel ◽  
...  
Keyword(s):  
Electronic Properties ◽  
Plasma Deposited Films ◽  
Deposited Films

Correlation of Raman Spectra and Bonding in DLC Films Deposited by Laser Ablation and Laser-Plasma Ablation Techniques

1991 ◽  
Vol 250 ◽  
Author(s):  
A. Rengan ◽  
J. Narayan ◽  
J. L. Park
Keyword(s):  
Laser Ablation ◽  
Laser Plasma ◽  
Deposition Temperature ◽  
Plasma Deposition ◽  
Raman Shift ◽  
Plasma Ablation ◽  
Valence Electrons ◽  
Diamondlike Carbon ◽  
Plasma Deposited Films ◽  
Deposited Films

AbstractWe have deposited diamondlike carbon (DLC) films on a variety of substrates from 250° C and higher. The effects of deposition temperature on the properties of DLC films deposited by a conventional laser ablation technique are compared with that of a unique laser-plasma deposition scheme. The calculated values of neff, the effective number of valence electrons, suggest that, with the increase in the deposition temperature, the diamondlike component (sp3 bonds) remains invariant for the laser deposited samples, and increases for the laser-plasma deposited films. Raman measurements show that the Raman allowed ‘G’ band upshifts to ˜1600 cm−1 for both deposition schemes. However, the disorder induced 'D' band remains invariant at ˜1370 cm−2 for the laser ablated samples, and downshifts to ˜1350 cm−1 for the laser-plasma deposited samples. These results suggest a correlation between the diamondlike content (sp3 bonds) and the Raman shift of the ‘D’ band.

DUV-induced micro and nanopatterning of polymer plasma deposited films

2009 ◽  
Vol 86 (4-6) ◽  
pp. 718-721 ◽  
Author(s):  
Olivier Soppera ◽  
Ali Dirani ◽  
Vincent Roucoules ◽  
Arnaud Ponche
Keyword(s):  
Plasma Deposited Films ◽  
Deposited Films
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