Atmospheric-Pressure Plasmas for Wide-Area Thin-Film Deposition and Etching

2007 ◽  
Vol 4 (3) ◽  
pp. 253-265 ◽  
Author(s):  
Volkmar Hopfe ◽  
David W. Sheel
Keyword(s):  
Thin Film ◽  
Atmospheric Pressure ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Wide Area ◽  
Atmospheric Pressure Plasmas

Atmospheric Pressure Low Temperature Direct Plasma Technology: Status and Challenges for Thin Film Deposition

2012 ◽  
Vol 9 (11-12) ◽  
pp. 1041-1073 ◽  
Author(s):  
Francoise Massines ◽  
Christian Sarra-Bournet ◽  
Fiorenza Fanelli ◽  
Nicolas Naudé ◽  
Nicolas Gherardi
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Atmospheric Pressure ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Plasma Technology

Ar/HMDSO/O2 Fed Atmospheric Pressure DBDs: Thin Film Deposition and GC-MS Investigation of By-Products

2010 ◽  
Vol 7 (7) ◽  
pp. 535-543 ◽  
Author(s):  
Fiorenza Fanelli ◽  
Sara Lovascio ◽  
Riccardo d'Agostino ◽  
Farzaneh Arefi-Khonsari ◽  
Francesco Fracassi
Keyword(s):  
Thin Film ◽  
Atmospheric Pressure ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
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