scholarly journals Room Temperature Growth of Indium-Tin Oxide on Organic Flexible Polymer Substrates Using a New Reactive-Sputter Deposition Technology

2007 ◽  
Vol 4 (1) ◽  
pp. 48-52 ◽  
Author(s):  
Jose V. Anguita ◽  
Michael Thwaites ◽  
Barry Holton ◽  
Peter Hockley ◽  
Stuart Rand ◽  
...  
Keyword(s):  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Room Temperature ◽  
Sputter Deposition ◽  
Temperature Growth ◽  
Polymer Substrates ◽  
Reactive Sputter Deposition ◽  
Flexible Polymer ◽  
Deposition Technology

Electro-structural and Film Growth Properties of Room-temperature Deposited Indium-Tin-Oxide on Polymer Substrates

2002 ◽  
Vol 747 ◽  
Author(s):  
Sung Kyu Park ◽  
Jeong In Han ◽  
Dae Gyu Moon ◽  
Won Keun Kim ◽  
Min Gi Kwak
Keyword(s):  
Oxygen Partial Pressure ◽  
Partial Pressure ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Room Temperature ◽  
Grain Structure ◽  
Growth Property ◽  
Polymer Substrates ◽  
Flexible Polymer ◽  
Ito Films

ABSTRACTElectrical and structural properties of indium-tin-oxide (ITO) films on flexible polymer substrates were investigated. Room temperature sputtered ITO films on polymer substrates are initially amorphous but become partially crystalline as oxygen partial pressure decreases under 1.5%. The crystallinity shows more (400) and (222) preferentially oriented textures as decreasing of oxygen pressure resulting in lower resistivity. Moreover, an interesting growth property similar to 3D growth mechanism including larger grain size and columnar-like grain structure was also observed. It is considered that the columnar-like grain structure is probably attributed to the poor surface morphology of polymer substrates Based on the experiments, we obtained high performance ITO films on a polycarbonate substrate including 3.8 × 10 –4 Ω-cm in resistivity and transmittance above 80% in the visible ranges at 0.2% oxygen partial pressure.

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