Investigation of Gas Phase Species and Deposition of SiO2 Films from HMDSO/O2 Plasmas

2006 ◽  
Vol 3 (3) ◽  
pp. 276-287 ◽  
Author(s):  
Dattatray S. Wavhal ◽  
Jianming Zhang ◽  
Michelle L. Steen ◽  
Ellen R. Fisher
Keyword(s):  
Gas Phase ◽  
Sio2 Films

IR spectra of SiO2 films deposited from the gas phase

1991 ◽  
Vol 55 (2) ◽  
pp. 753-757
Author(s):  
T. V. Sidorenko ◽  
N. N. Syrbu ◽  
O. V. Nikulin ◽  
V. D. Prilepov ◽  
N. M. Oliferenko
Keyword(s):  
Ir Spectra ◽  
Gas Phase ◽  
Sio2 Films

scholarly journals MECHANISM OF STEP COVERAGE FORMATION OF SiO2 FILMS FROM TEOS AND EFFECTS OF GAS PHASE ADDITIVES STUDIED BY MICRO/MACROCAVITY METHOD

1991 ◽  
Vol 02 (C2) ◽  
pp. C2-55-C2-61
Author(s):  
Y. EGASHIRA ◽  
T. SORITA ◽  
S. SHIGA ◽  
K. IKUTA ◽  
H. KOMIYAMA
Keyword(s):  
Gas Phase ◽  
Sio2 Films ◽  
Step Coverage

Residual Gas Reactions in the Electron Microscope: I. Qualitative Observations on the Water Gas Reaction

1968 ◽  
Vol 26 ◽  
pp. 292-293
Author(s):  
Richard E. Hartman ◽  
Roberta S. Hartman ◽  
Peter L. Ramos
Keyword(s):  
Electron Beam ◽  
Electron Microscope ◽  
Gas Phase ◽  
Absolute Temperature ◽  
Residual Gas ◽  
Gas Reactions ◽  
Image Position ◽  
The Right ◽  
Water Gas ◽  
Thinning Rate

The action of water and the electron beam on organic specimens in the electron microscope results in the removal of oxidizable material (primarily hydrogen and carbon) by reactions similar to the water gas reaction .which has the form:The energy required to force the reaction to the right is supplied by the interaction of the electron beam with the specimen.The mass of water striking the specimen is given by:where u = gH2O/cm2 sec, PH2O = partial pressure of water in Torr, & T = absolute temperature of the gas phase. If it is assumed that mass is removed from the specimen by a reaction approximated by (1) and that the specimen is uniformly thinned by the reaction, then the thinning rate in A/ min iswhere x = thickness of the specimen in A, t = time in minutes, & E = efficiency (the fraction of the water striking the specimen which reacts with it).

Integration of Core-Edge Spectroscopy Methods for the Study of Polymers

1996 ◽  
Vol 54 ◽  
pp. 154-155
Author(s):  
E. G. Rightor
Keyword(s):  
Excited State ◽  
Polymer Blends ◽  
Gas Phase ◽  
Spatial Resolution ◽  
High Spatial Resolution ◽  
Electronic States ◽  
Core Electron ◽  
Bulk Solids ◽  
Development Application

Core edge spectroscopy methods are versatile tools for investigating a wide variety of materials. They can be used to probe the electronic states of materials in bulk solids, on surfaces, or in the gas phase. This family of methods involves promoting an inner shell (core) electron to an excited state and recording either the primary excitation or secondary decay of the excited state. The techniques are complimentary and have different strengths and limitations for studying challenging aspects of materials. The need to identify components in polymers or polymer blends at high spatial resolution has driven development, application, and integration of results from several of these methods.

Radiation less transitions in gas phase molecular ions

1980 ◽  
Vol 77 ◽  
pp. 705-718 ◽  
Author(s):  
Sydney Leach ◽  
Gérald Dujardin ◽  
Guy Taieb
Keyword(s):  
Gas Phase ◽  
Molecular Ions
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