Characterization of coplanar strip lines on dielectric boards for RF and microwave applications

Author(s):  
Young K. Song ◽  
Chin C. Lee
2002 ◽  
Vol 729 ◽  
Author(s):  
Anupama B. Kaul ◽  
Tomasz Klosowiak ◽  
Joshua Liu

AbstractAn approach for measuring force-dependent properties of microscopic structures commonly found in MEMS has been developed. The system has the capability of measuring forces and deflections of the order of micro-newtons and micro-meters, respectively. By implementing a visual inspection system, force is applied to localized areas on a beam, and the resulting force-deflection characteristic can be obtained. From this beam stiffness and effective elastic modulus can be calculated. These results were compared to simulation, which was performed using ANSYS FEM code. In addition, by applying a known mechanical force, direct correlation to voltage and thus electrostatic force can be obtained, which also elucidates the magnitude of the electrostatic feedback effect. Characterization of other force-dependent parameters such as DC contact resistance and isolation/insertion loss at RF and microwave frequencies was obtained experimentally, from which parameters such as lumped capacitance can be extracted.


1993 ◽  
Vol 195 ◽  
pp. 559-562 ◽  
Author(s):  
M. Lenkens ◽  
B. Aschermann ◽  
S. Hensen ◽  
M. Jeck ◽  
S. Orbach ◽  
...  

2015 ◽  
Vol 200 ◽  
pp. 40-49 ◽  
Author(s):  
Teena Thomas ◽  
Bipinbal P. Kanoth ◽  
C.M. Nijas ◽  
P.A. Joy ◽  
Joseph M. Joseph ◽  
...  

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