Raman characterization of the structural evolution in amorphous and partially nanocrystalline hydrogenated silicon thin films prepared by PECVD

2011 ◽  
Vol 42 (3) ◽  
pp. 415-421 ◽  
Author(s):  
Zhi Li ◽  
Wei Li ◽  
Yadong Jiang ◽  
Haihong Cai ◽  
Yuguang Gong ◽  
...  
2000 ◽  
Vol 88 (4) ◽  
pp. 1907-1915 ◽  
Author(s):  
Tatiana Globus ◽  
Gautam Ganguly ◽  
Pere Roca i Cabarrocas

1987 ◽  
Vol 155 (2) ◽  
pp. 227-242 ◽  
Author(s):  
C. Godet ◽  
B. Marchon ◽  
M.P. Schmidt

2006 ◽  
Vol 20 (27) ◽  
pp. 1739-1747 ◽  
Author(s):  
QINGSONG LEI ◽  
ZHIMENG WU ◽  
XINHUA GENG ◽  
YING ZHAO ◽  
JIANPING XI

Hydrogenated silicon thin films (Si:H) have been deposited by using very high-frequency plasma-enhanced chemical vapor deposition (VHF PECVD). The structural, electrical and optical properties of the films were characterized. The transition process and the effect of pressure were studied. Results suggest that a narrow region, in which the transition from microcrystalline to amorphous growth takes place, exists in the regime of silane concentration (SC). This region is influenced by the working pressure (P). At lower pressure, the transition region is shifted to higher SC. Microcrystalline silicon (μ c-Si:H ) thin films deposited near transition region was applied as i-layer to the p-i-n solar cells. An efficiency of about 5.30% was obtained.


2006 ◽  
Vol 89 (5) ◽  
pp. 051922 ◽  
Author(s):  
P. C. P. Bronsveld ◽  
J. K. Rath ◽  
R. E. I. Schropp ◽  
T. Mates ◽  
A. Fejfar ◽  
...  

1997 ◽  
Vol 109-110 ◽  
pp. 359-361 ◽  
Author(s):  
J.C. Alonso ◽  
R. Diamant ◽  
E. Haro-Poniatowski ◽  
M. Fernández-Guasti ◽  
G. Muñoz ◽  
...  

2007 ◽  
Vol 561-565 ◽  
pp. 1161-1164
Author(s):  
Xiao Na Li ◽  
Bing Hu ◽  
Chuang Dong ◽  
Xin Jiang

Fe/Si multi-layer films were fabricated on Si (100) substrates utilizing radio frequency magnetron sputtering system. Si/β-FeSi2 structure was found in the films after the deposition. Structural characterization of Fe-silicide sample was performed by transmission electron microscopy, to explore the dependence of the microstructure of β-FeSi2 film on the preparation parameters. It was found that β-FeSi2 particles were formed after the deposition without annealing, whose size is less than 20nm ,with a direct band-gap of 0.94eV in room temperature. After annealing at 850°C, particles grow lager, however the stability of thin films was still good.


1997 ◽  
Vol 282-287 ◽  
pp. 583-584 ◽  
Author(s):  
M. Holiastou ◽  
N. Poulakis ◽  
D. Palles ◽  
E. Liarokapis ◽  
D. Niarchos ◽  
...  

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