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Vol 62 (2) ◽  
pp. 113-117 ◽  
Author(s):  
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R. W. Eddy ◽  
W. J. Duryea
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Chunmei Zhang ◽  
Li Zeng ◽  
Hao Xu ◽  
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Vol 84 (11) ◽  
pp. 2572-2574 ◽  
Author(s):  
P.G. Vermont ◽  
X. Pages ◽  
E.H.A. Granneman ◽  
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Temperature Control

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Keyword(s):  
Low Temperature ◽  
Temperature Control ◽  
Low Temperature Plasma ◽  
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