Electrical properties of anodized hf thin-film capacitors

Atsushi Noya; Toshiji Umezawa

doi:10.1002/ecjb.4420680408

Electrical properties of anodized hf thin-film capacitors

Electronics and Communications in Japan (Part II Electronics) ◽

10.1002/ecjb.4420680408 ◽

1985 ◽

Vol 68 (4) ◽

pp. 64-72

Author(s):

Atsushi Noya ◽

Toshiji Umezawa

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Thin Film Capacitors

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Electrical Properties of Lead Lanthanum Titanate Thin-Film Capacitors Prepared by Sol-Gel Method

Japanese Journal of Applied Physics ◽

10.1143/jjap.34.6133 ◽

1995 ◽

Vol 34 (Part 1, No. 11) ◽

pp. 6133-6138 ◽

Cited By ~ 3

Author(s):

Su Jae Lee ◽

Min Su Jang ◽

Chae Ryong Cho ◽

Kwang Yong Kang ◽

SeokKilHan

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Sol Gel ◽

Gel Method ◽

Sol Gel Method ◽

Thin Film Capacitors ◽

Lanthanum Titanate ◽

Titanate Thin Film

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Fabrication and Electrical Properties of Strain-Modulated Epitaxial Ba[sub 0.5]Sr[sub 0.5]TiO[sub 3] Thin-Film Capacitors

Journal of The Electrochemical Society ◽

10.1149/1.2755636 ◽

2007 ◽

Vol 154 (9) ◽

pp. G193 ◽

Cited By ~ 13

Author(s):

Yuan-Chang Liang ◽

Yung-Ching Liang

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Thin Film Capacitors

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Electrical properties of Pb(Zr0.53Ti0.47)O3 thin film capacitors with modified RuO2 bottom electrodes

Integrated Ferroelectrics ◽

10.1080/10584589508012309 ◽

1995 ◽

Vol 8 (1-2) ◽

pp. 151-163 ◽

Cited By ~ 11

Author(s):

H. N. Al-Shareef ◽

K. R. Bellur ◽

O. Auciello ◽

A. I. Kingon

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Thin Film Capacitors

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Effects of in-plane compressive stress on electrical properties of (Ba,Sr)TiO3 thin film capacitors prepared by on- and off-axis rf magnetron sputtering

Applied Physics Letters ◽

10.1063/1.1629790 ◽

2003 ◽

Vol 83 (21) ◽

pp. 4387-4389 ◽

Cited By ~ 40

Author(s):

Woo Young Park ◽

Kun Ho Ahn ◽

Cheol Seong Hwang

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Magnetron Sputtering ◽

Compressive Stress ◽

Rf Magnetron Sputtering ◽

Tio3 Thin Film ◽

Thin Film Capacitors

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Polishing damages to electrical properties of BLT thin film capacitors fabricated by damascene process of chemical mechanical polishing

2008 17th IEEE International Symposium on the Applications of Ferroelectrics ◽

10.1109/isaf.2008.4693730 ◽

2008 ◽

Author(s):

Nam-Hoon Kim ◽

Pan-Gum Jung ◽

Pil-Ju Ko ◽

Woo-Sun Lee

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Chemical Mechanical Polishing ◽

Mechanical Polishing ◽

Damascene Process ◽

Thin Film Capacitors

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Changes in the electrical properties of thin-film capacitors during breakdown

Soviet Physics Journal ◽

10.1007/bf00817940 ◽

1968 ◽

Vol 11 (9) ◽

pp. 31-34

Author(s):

G. A. Vorob'ev ◽

V. A. Mukhachev

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Thin Film Capacitors

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Thickness-Dependent Electrical Properties of Pb(Zr, Ti)O[sub 3] Thin Film Capacitors for Memory Device Applications

Journal of The Electrochemical Society ◽

10.1149/1.1393194 ◽

2000 ◽

Vol 147 (1) ◽

pp. 326 ◽

Cited By ~ 12

Author(s):

T. K. Kundu ◽

Joseph Ya-min Lee

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Memory Device ◽

Thin Film Capacitors ◽

Device Applications

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The electrical properties and retention characteristics of strained PZT thin film capacitors

Integrated Ferroelectrics ◽

10.1080/10584580108015687 ◽

2001 ◽

Vol 37 (1-4) ◽

pp. 285-294 ◽

Cited By ~ 2

Author(s):

Youngsung Kim ◽

Wangkyu Lim ◽

Jaichan Lee

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Thin Film Capacitors ◽

Pzt Thin Film ◽

Retention Characteristics

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Chpater 31: Electrical Properties of Pb(Zr[sub(0.53)]Ti[sub(0.47)] )O[sub(3)] Thin Film Capacitors with Modified Ru02 Bottom Electrrodes

Science and Technology of Integrated Ferroelectrics ◽

10.1201/9781482283365-40 ◽

2001 ◽

pp. 441-454

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Thin Film Capacitors

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The effect of annealing temperature on the electrical properties of metal-ferroelectric (PbZr0.53Ti0.47O3)-insulator (ZrO2)-semiconductor (MFIS) thin-film capacitors

Microelectronic Engineering ◽

10.1016/j.mee.2007.04.004 ◽

2007 ◽

Vol 84 (9-10) ◽

pp. 2014-2017 ◽

Cited By ~ 5

Author(s):

P.C. Juan ◽

J.D. Jiang ◽

W.C. Shih ◽

J.Y.M. Lee

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Annealing Temperature ◽

Thin Film Capacitors

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