Atomic Layer Deposition and Properties of Lanthanum Oxide and Lanthanum-Aluminum Oxide Films

2006 ◽  
Vol 12 (2-3) ◽  
pp. 158-164 ◽  
Author(s):  
K. Kukli ◽  
M. Ritala ◽  
V. Pore ◽  
M. Leskelä ◽  
T. Sajavaara ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Aluminum Oxide ◽  
Lanthanum Oxide ◽  
Oxide Films ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Lanthanum Aluminum Oxide

Atomic Layer Deposition of Lanthanum Oxide Films for High-κ Gate Dielectrics

2004 ◽  
Vol 7 (7) ◽  
pp. G131 ◽  
Author(s):  
Weiming He ◽  
Steven Schuetz ◽  
Raj Solanki ◽  
John Belot ◽  
James McAndrew
Keyword(s):  
Atomic Layer Deposition ◽  
Lanthanum Oxide ◽  
Gate Dielectrics ◽  
Oxide Films ◽  
Atomic Layer ◽  
Layer Deposition

Goniocolorimetric study of aluminum oxide films deposited by atomic layer deposition

2012 ◽  
Vol 520 (7) ◽  
pp. 2943-2948 ◽  
Author(s):  
Peter G. Gordon ◽  
Réjean Baribeau ◽  
Seán T. Barry
Keyword(s):  
Atomic Layer Deposition ◽  
Aluminum Oxide ◽  
Oxide Films ◽  
Atomic Layer ◽  
Layer Deposition

Atomic layer deposition of lanthanum aluminum oxide nano-laminates for electrical applications

2004 ◽  
Vol 84 (20) ◽  
pp. 3957-3959 ◽  
Author(s):  
Booyong S. Lim ◽  
Antti Rahtu ◽  
Philippe de Rouffignac ◽  
Roy G. Gordon
Keyword(s):  
Atomic Layer Deposition ◽  
Aluminum Oxide ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Lanthanum Aluminum Oxide

Atomic Layer Deposition of Aluminum Oxide Films for Carbon Nanotube Network Transistor Passivation

2011 ◽  
Vol 11 (10) ◽  
pp. 8818-8825 ◽  
Author(s):  
Kestutis Grigoras ◽  
Marina Y. Zavodchikova ◽  
Albert G. Nasibulin ◽  
Esko I. Kauppinen ◽  
Vladimir Ermolov ◽  
...  
Keyword(s):  
Carbon Nanotube ◽  
Atomic Layer Deposition ◽  
Aluminum Oxide ◽  
Oxide Films ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Carbon Nanotube Network

Synthesis of nanoporous activated iridium oxide films by anodized aluminum oxide templated atomic layer deposition

2010 ◽  
Vol 12 (11) ◽  
pp. 1543-1546 ◽  
Author(s):  
David J. Comstock ◽  
Steven T. Christensen ◽  
Jeffrey W. Elam ◽  
Michael J. Pellin ◽  
Mark C. Hersam
Keyword(s):  
Atomic Layer Deposition ◽  
Aluminum Oxide ◽  
Oxide Films ◽  
Atomic Layer ◽  
Iridium Oxide ◽  
Anodized Aluminum ◽  
Anodized Aluminum Oxide ◽  
Layer Deposition

scholarly journals Atomic layer deposition of aluminum oxide films on graphene

2013 ◽  
Vol 49 ◽  
pp. 012014 ◽  
Author(s):  
Raul Rammula ◽  
Lauri Aarik ◽  
Arne Kasikov ◽  
Jekaterina Kozlova ◽  
Tauno Kahro ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Aluminum Oxide ◽  
Oxide Films ◽  
Atomic Layer ◽  
Layer Deposition

scholarly journals A liquid alkoxide precursor for the atomic layer deposition of aluminum oxide films

2020 ◽  
Vol 38 (2) ◽  
pp. 022417
Author(s):  
LiAo Cao ◽  
Felix Mattelaer ◽  
Timo Sajavaara ◽  
Jolien Dendooven ◽  
Christophe Detavernier
Keyword(s):  
Atomic Layer Deposition ◽  
Aluminum Oxide ◽  
Oxide Films ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Alkoxide Precursor
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