Growth of Hafnium Aluminate Thin Films by Liquid Injection MOCVD Using Alkoxide Precursors

2004 ◽  
Vol 10 (5) ◽  
pp. 275-279 ◽  
Author(s):  
P.A. Marshall ◽  
R.J. Potter ◽  
A.C. Jones ◽  
P.R. Chalker ◽  
S. Taylor ◽  
...  
Keyword(s):  
Thin Films ◽  
Liquid Injection ◽  
Alkoxide Precursors

Liquid Injection MOCVD of Rare-Earth Oxides Using New Alkoxide Precursors

2003 ◽  
Vol 784 ◽  
Author(s):  
Paul A. Williams ◽  
Anthony C. Jones ◽  
Helen C. Aspinall ◽  
Jeffrey M. Gaskell ◽  
Paul R. Chalker ◽  
...  
Keyword(s):  
Thin Films ◽  
Rare Earth ◽  
Lanthanum Oxide ◽  
Molecular Aggregation ◽  
Praseodymium Oxide ◽  
H Nmr ◽  
Liquid Injection ◽  
Solution Studies ◽  
Alkoxide Precursors ◽  
Donor Species

ABSTRACTHigh purity lanthanum oxide and praseodymium oxide thin films (C< 1 at.-%) have been deposited by liquid injection MOCVD using the volatile alkoxide precursos [La(mmp)3] and [Pr(mmp)3] in toluene-solution (mmp = OCMe2CH2OMe). 1H NMR solution studies have shown that the addition of donor species, such as tetraglyme (CH3O(CH2CH2O)4CH3) or mmpH prevent molecular aggregation and help stabilise the precursors.

Liquid Injection MOCVD of Rare-Earth Oxides Using New Alkoxide Precursors

2003 ◽  
Vol 786 ◽  
Author(s):  
Paul A. Williams ◽  
Anthony C. Jones ◽  
Helen C. Aspinall ◽  
Jeffrey M. Gaskell ◽  
Paul R. Chalker ◽  
...  
Keyword(s):  
Thin Films ◽  
Rare Earth ◽  
Lanthanum Oxide ◽  
Molecular Aggregation ◽  
Praseodymium Oxide ◽  
H Nmr ◽  
Liquid Injection ◽  
Solution Studies ◽  
Alkoxide Precursors ◽  
Donor Species

ABSTRACTHigh purity lanthanum oxide and praseodymium oxide thin films (C< 1 at.-%) have been deposited by liquid injection MOCVD using the volatile alkoxide precursos [La(mmp)3] and [Pr(mmp)3] in toluene-solution (mmp = OCMe2CH2OMe). 1H NMR solution studies have shown that the addition of donor species, such as tetraglyme (CH3O(CH2CH2O)4CH3) or mmpH prevent molecular aggregation and help stabilise the precursors.

A Novel Direct Liquid Injection Low Pressure Chemical Vapor Deposition System (DLI-LPCVD) for the Deposition of Thin Films

2017 ◽  
Vol 19 (8) ◽  
pp. 1700193 ◽  
Author(s):  
Mattias Vervaele ◽  
Bert De Roo ◽  
Jolien Debehets ◽  
Marilyne Sousa ◽  
Luman Zhang ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Liquid Injection ◽  
Pressure Chemical ◽  
Direct Liquid Injection

Growth of Lanthanum Oxide Thin Films by Liquid Injection MOCVD Using a Novel Lathanum Alkoxide Precursor

2004 ◽  
Vol 10 (1) ◽  
pp. 13-17 ◽  
Author(s):  
H.C. Aspinall ◽  
J. Gaskell ◽  
P.A. Williams ◽  
A.C. Jones ◽  
P.R. Chalker ◽  
...  
Keyword(s):  
Thin Films ◽  
Lanthanum Oxide ◽  
Oxide Thin Films ◽  
Liquid Injection ◽  
Alkoxide Precursor

Chemical Vapor Deposition of Sr1−xBaxNb2O6 Thin Films Using Metal Alkoxide Precursors

2000 ◽  
Vol 15 (8) ◽  
pp. 1702-1708
Author(s):  
Ruichao Zhang ◽  
Ren Xu
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Single Phase ◽  
Chemical Vapor ◽  
Deposition Process ◽  
Thin Layers ◽  
Metal Alkoxide ◽  
Stoichiometry Control ◽  
Alkoxide Precursors

A novel two-step metalorganic chemical vapor deposition process was used in this study to prepare Sr1−xBaxNb2O6 (SBN) thin films. Two thin layers of single-phase SrNb2O6 and BaNb2O6 were deposited alternately on a silicon substrate, and the solid solution of SBN was obtained by high-temperature annealing. The stoichiometry control of the SrNb2O6 and the BaNb2O6 thin films was achieved through deposition process control, according to the evaporation characteristics of double metal alkoxide. The evaporation behavior of double metal alkoxide precursors SrNb2(1-OC4H9)12 and BaNb2(1-OC4H9)12 was studied, and the results were compared with the evaporation of single alkoxide Nb(1-OC4H9)5.

The quest towards epitaxial BaMgF4 thin films: exploring MOCVD as a chemical scalable approach for the deposition of complex metal fluoride films

2016 ◽  
Vol 45 (44) ◽  
pp. 17833-17842 ◽  
Author(s):  
Sergio Battiato ◽  
Jean-Luc Deschanvres ◽  
Hervé Roussel ◽  
Laetitia Rapenne ◽  
Béatrice Doisneau ◽  
...  
Keyword(s):  
Thin Films ◽  
Metal Fluoride ◽  
Complex Metal ◽  
Liquid Injection ◽  
Synthetic Routes

Conventional and Liquid Injection MOCVD have been explored as synthetic routes for the growth of BaMgF4 films on SrTiO3 (001) substrates.

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