Electron Impact Ionization and Fragmentation of Metal-Organic Compounds Used in Plasma Assisted Thin Film Deposition Techniques

1995 ◽  
Vol 35 (4-5) ◽  
pp. 375-393 ◽  
Author(s):  
R. Basner ◽  
M. Schmidt ◽  
H. Deutsch
Keyword(s):  
Thin Film ◽  
Electron Impact ◽  
Organic Compounds ◽  
Impact Ionization ◽  
Thin Film Deposition ◽  
Electron Impact Ionization ◽  
Film Deposition ◽  
Metal Organic ◽  
Deposition Techniques

Spray Pyrolysis Thin Film Deposition Technique for Micro-Sensors and Devices

2020 ◽  
pp. 178-202
Author(s):  
Monoj Kumar Singha ◽  
Vineet Rojwal
Keyword(s):  
Thin Film ◽  
Spray Pyrolysis ◽  
Thin Film Deposition ◽  
Deposition Process ◽  
Film Deposition ◽  
Deposition Technique ◽  
Uv Photodetector ◽  
Spray Process ◽  
Spray Pyrolysis Deposition ◽  
Deposition Techniques

Thin film is used for sensing and electronic devices applications. Various techniques are used for thin film deposition. This chapter presents the Spray pyrolysis deposition technique used for the growth of thin films sensing and device material. Spray pyrolysis is an inexpensive method to grow good crystalline thin film compared to other thin film deposition techniques. The chapter gives an overview of the spray process used for thin film deposition. Basic setup for this process is explained. Parameters affecting the deposition process is explained, as are the various spray methods. Finally, some examples of spray pyrolysis in different applications like a gas sensor, UV photodetector, solar cell, photocatalysis, and supercapacitor are discussed.

Thin Film Deposition Techniques in Microelectronics

JOM ◽  
1986 ◽  
Vol 38 (2) ◽  
pp. 55-65 ◽  
Author(s):  
F. O. Sequeda
Keyword(s):  
Thin Film ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Deposition Techniques

Physical vapour thin film deposition techniques

2004 ◽  
Author(s):  
H C Freyhardt ◽  
R W�rdenweber ◽  
B Utz ◽  
A Usoskin ◽  
Y Yamada
Keyword(s):  
Thin Film ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Deposition Techniques
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