Characteristics of an atmospheric-pressure radio frequency-driven Ar/H2 plasma discharge with copper wire in tube

2017 ◽  
Vol 58 (4) ◽  
pp. 252-259 ◽  
Author(s):  
Q.J. Guo ◽  
G.H. Ni ◽  
L. Li ◽  
Q.F. Lin ◽  
P. Zhao ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Atmospheric Pressure ◽  
Copper Wire ◽  
Plasma Discharge

Influence of oxygen traces on an atmospheric-pressure radio-frequency capacitive argon plasma discharge

2011 ◽  
Vol 18 (10) ◽  
pp. 103502 ◽  
Author(s):  
Shou-Zhe Li ◽  
Qi Wu ◽  
Wen Yan ◽  
Dezhen Wang ◽  
Han S. Uhm
Keyword(s):  
Radio Frequency ◽  
Atmospheric Pressure ◽  
Argon Plasma ◽  
Plasma Discharge

Characteristic Study of an Atmospheric-Pressure Radio-Frequency Capacitive Argon/Nitrogen Plasma Discharge

2014 ◽  
Vol 42 (6) ◽  
pp. 1648-1653 ◽  
Author(s):  
Ying Huai ◽  
Shou-Zhe Li ◽  
Hong Li ◽  
Kenan Wu ◽  
Jialiang Zhang ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Atmospheric Pressure ◽  
Plasma Discharge ◽  
Nitrogen Plasma

The driving frequency effects on the atmospheric pressure corona jet plasmas from low frequency to radio frequency

2011 ◽  
Vol 18 (4) ◽  
pp. 043503 ◽  
Author(s):  
Dan Bee Kim ◽  
H. Jung ◽  
B. Gweon ◽  
S. Y. Moon ◽  
J. K. Rhee ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Atmospheric Pressure ◽  
Low Frequency ◽  
Driving Frequency ◽  
Frequency Effects

Radio frequency expanding plasmas at low, intermediate, and atmospheric pressure and their applications

2008 ◽  
Vol 80 (9) ◽  
pp. 1919-1930 ◽  
Author(s):  
Gheorghe Dinescu ◽  
Eusebiu R. Ionita
Keyword(s):  
Radio Frequency ◽  
Atmospheric Pressure ◽  
Thin Film Deposition ◽  
Plasma Jets ◽  
Film Deposition ◽  
High Mass ◽  
Rf Plasma ◽  
Temperature Sensitive ◽  
Large Size ◽  
Wide Range

We report on the operation and characteristics of radio frequency (RF) plasma beam sources based on the expansion of the discharge outside of limited spaces with small interelectrode gaps. The appropriate electrode configuration, combined with high mass flow values and appropriate power levels, leads to small- or large-size plasma jets, working stably at low, intermediate, and atmospheric pressures. The sources are promising tools for a wide range of applications in thin film deposition, surface modification, and cleaning, including the case of temperature-sensitive substrates.

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