Doping process control in silicon epitaxy (III). Realization of optimum control function
1983 ◽
Vol 18
(12)
◽
pp. 1541-1545
◽
1988 ◽
Vol 23
(10-11)
◽
pp. 1323-1330
◽
2002 ◽
Vol 28
(12)
◽
pp. 1126-1134
◽
Keyword(s):
Keyword(s):
1972 ◽
Vol 5
(1)
◽
pp. 357-365
◽
Keyword(s):
1967 ◽
Vol 71
(676)
◽
pp. 252-256
2011 ◽
Vol 60
(4)
◽
pp. 253-256
1983 ◽
Vol 18
(12)
◽
pp. 1533-1540
◽