A virtual metrology system based on least angle regression and statistical clustering

2012 ◽  
Vol 29 (4) ◽  
pp. 362-376 ◽  
Author(s):  
Gian Antonio Susto ◽  
Alessandro Beghi
Keyword(s):  
Least Angle Regression ◽  
Virtual Metrology ◽  
Metrology System ◽  
Statistical Clustering

A novel automatic virtual metrology system architecture for TFT-LCD industry based on main memory database

2012 ◽  
Vol 28 (4) ◽  
pp. 559-568 ◽  
Author(s):  
Min-Hsiung Hung ◽  
Wen-Huang Tsai ◽  
Haw-Ching Yang ◽  
Yi-Jhong Kao ◽  
Fan-Tien Cheng
Keyword(s):  
System Architecture ◽  
Main Memory ◽  
Virtual Metrology ◽  
Main Memory Database ◽  
Metrology System

Development of cloud-based automatic virtual metrology system for semiconductor industry

2015 ◽  
Vol 34 ◽  
pp. 30-43 ◽  
Author(s):  
Hsien-Cheng Huang ◽  
Yu-Chuan Lin ◽  
Min-Hsiung Hung ◽  
Chia-Chun Tu ◽  
Fan-Tien Cheng
Keyword(s):  
Semiconductor Industry ◽  
Virtual Metrology ◽  
Metrology System

A virtual metrology system for semiconductor manufacturing

2009 ◽  
Vol 36 (10) ◽  
pp. 12554-12561 ◽  
Author(s):  
Pilsung Kang ◽  
Hyoung-joo Lee ◽  
Sungzoon Cho ◽  
Dongil Kim ◽  
Jinwoo Park ◽  
...  
Keyword(s):  
Semiconductor Manufacturing ◽  
Virtual Metrology ◽  
Metrology System

scholarly journals A Realizable Overlay Virtual Metrology System in Semiconductor Manufacturing: Proposal, Challenges and Future Perspective

IEEE Access ◽  
2021 ◽  
pp. 1-1
Author(s):  
Tze Chiang Tin ◽  
Saw Chin Tan ◽  
Hing Yong ◽  
Jimmy Ook Hyun Kim ◽  
Eric Ken Yong Teo ◽  
...  
Keyword(s):  
Semiconductor Manufacturing ◽  
Future Perspective ◽  
Virtual Metrology ◽  
Metrology System
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