Hysteresis Compensation and Adaptive Controller Design for a Piezoceramic Actuator System in Atomic Force Microscopy

Ping-Lang Yen; Mu-Tian Yan; Yil Chen

doi:10.1002/asjc.453

Hysteresis Compensation and Adaptive Controller Design for a Piezoceramic Actuator System in Atomic Force Microscopy

Asian Journal of Control ◽

10.1002/asjc.453 ◽

2011 ◽

Vol 14 (4) ◽

pp. 1012-1027 ◽

Cited By ~ 19

Author(s):

Ping-Lang Yen ◽

Mu-Tian Yan ◽

Yil Chen

Keyword(s):

Atomic Force Microscopy ◽

Controller Design ◽

Adaptive Controller ◽

Piezoceramic Actuator ◽

Force Microscopy ◽

Hysteresis Compensation ◽

Atomic Force ◽

Actuator System

Download Full-text

Hysteresis compensation and adaptive controller design for a piezoceramic actuator system in atomic force microscopy

2009 IEEE/ASME International Conference on Advanced Intelligent Mechatronics ◽

10.1109/aim.2009.5229938 ◽

2009 ◽

Author(s):

Yil Chen ◽

Mu-Tian Yan

Keyword(s):

Atomic Force Microscopy ◽

Controller Design ◽

Adaptive Controller ◽

Piezoceramic Actuator ◽

Force Microscopy ◽

Hysteresis Compensation ◽

Atomic Force ◽

Actuator System

Download Full-text

Output feedback robust adaptive controller design for dynamic atomic force microscopy

2010 IEEE International Conference on Control Applications ◽

10.1109/cca.2010.5611279 ◽

2010 ◽

Cited By ~ 1

Author(s):

Yudong Zhang ◽

Yongchun Fang ◽

Xiaokun Dong

Keyword(s):

Atomic Force Microscopy ◽

Output Feedback ◽

Controller Design ◽

Adaptive Controller ◽

Force Microscopy ◽

Atomic Force ◽

Robust Adaptive ◽

Robust Adaptive Controller

Download Full-text

Modeling and Controller Design of a Precision Hybrid Scanner for Application in Large Measurement-Range Atomic Force Microscopy

IEEE Transactions on Industrial Electronics ◽

10.1109/tie.2013.2279352 ◽

2014 ◽

Vol 61 (7) ◽

pp. 3704-3712 ◽

Cited By ~ 24

Author(s):

Jim-Wei Wu ◽

Kuan-Chia Huang ◽

Ming-Li Chiang ◽

Mei-Yung Chen ◽

Li-Chen Fu

Keyword(s):

Atomic Force Microscopy ◽

Controller Design ◽

Measurement Range ◽

Force Microscopy ◽

Atomic Force ◽

Large Measurement ◽

Hybrid Scanner

Download Full-text

Parameter Self-Turning Fuzzy PID Controller Design for Atomic Force Microscopy in Z-Axis

2018 IEEE 8th Annual International Conference on CYBER Technology in Automation, Control, and Intelligent Systems (CYBER) ◽

10.1109/cyber.2018.8688045 ◽

2018 ◽

Author(s):

Yinan Wu ◽

Yongchun Fang

Keyword(s):

Atomic Force Microscopy ◽

Pid Controller ◽

Controller Design ◽

Fuzzy Pid ◽

Force Microscopy ◽

Fuzzy Pid Controller ◽

Atomic Force ◽

Pid Controller Design

Download Full-text

Artificial neural network based hysteresis compensation for piezoelectric tube scanner in atomic force microscopy

TENCON 2012 IEEE Region 10 Conference ◽

10.1109/tencon.2012.6412244 ◽

2012 ◽

Author(s):

Y. S. Othman ◽

Iskandar A. Mahmood ◽

Nahrul Khair Alang Md Rashid ◽

Fadly Jashi Darsivan

Keyword(s):

Neural Network ◽

Artificial Neural Network ◽

Atomic Force Microscopy ◽

Force Microscopy ◽

Hysteresis Compensation ◽

Atomic Force ◽

Artificial Neural

Download Full-text

Data-Driven Controller Design for Atomic-Force Microscopy

IFAC-PapersOnLine ◽

10.1016/j.ifacol.2017.08.1972 ◽

2017 ◽

Vol 50 (1) ◽

pp. 10437-10442 ◽

Cited By ~ 2

Author(s):

Christoph Kammer ◽

Adrian P. Nievergelt ◽

Georg E. Fantner ◽

Alireza Karimi

Keyword(s):

Atomic Force Microscopy ◽

Controller Design ◽

Data Driven ◽

Force Microscopy ◽

Atomic Force

Download Full-text

Hysteresis compensation for Piezoelectric tube scanner in atomic force microscopy

2012 International Conference on Enabling Science and Nanotechnology ◽

10.1109/escinano.2012.6149633 ◽

2012 ◽

Cited By ~ 1

Author(s):

Yahya Sherif Othman ◽

Iskandar A. Mahmood ◽

Nahrul Khair Alang Md Rashid

Keyword(s):

Atomic Force Microscopy ◽

Force Microscopy ◽

Hysteresis Compensation ◽

Atomic Force

Download Full-text

Model-based feedback controller design for dual actuated atomic force microscopy

Mechatronics ◽

10.1016/j.mechatronics.2011.08.003 ◽

2012 ◽

Vol 22 (3) ◽

pp. 327-337 ◽

Cited By ~ 31

Author(s):

S. Kuiper ◽

G. Schitter

Keyword(s):

Atomic Force Microscopy ◽

Controller Design ◽

Feedback Controller ◽

Force Microscopy ◽

Model Based ◽

Atomic Force

Download Full-text

A double velocity feedback controller design for high speed atomic force microscopy

2013 IEEE International Conference on Control Applications (CCA) ◽

10.1109/cca.2013.6662790 ◽

2013 ◽

Cited By ~ 1

Author(s):

Sajal K. Das ◽

Hemanshu R. Pota ◽

Ian R. Petersen

Keyword(s):

Atomic Force Microscopy ◽

High Speed ◽

Controller Design ◽

Feedback Controller ◽

Velocity Feedback ◽

Force Microscopy ◽

Atomic Force

Download Full-text

Prandtl-Ishlinskii Model-based Hysteresis Compensation of a Piezoelectric Scanner for Atomic Force Microscopy

New Physics Sae Mulli ◽

10.3938/npsm.67.1520 ◽

2017 ◽

Vol 67 (12) ◽

pp. 1520-1527

Author(s):

Bernard Ouma ALUNDA ◽

Melody CHEPKOECH ◽

Clare Chisu BYEON ◽

Yong Joong LEE* ◽

Soyeun PARK��

Keyword(s):

Atomic Force Microscopy ◽

Force Microscopy ◽

Hysteresis Compensation ◽

Model Based ◽

Atomic Force

Download Full-text