Deep Learning for Rapid Analysis of Spectroscopic Ellipsometry Data

Advanced Photonics Research ◽

10.1002/adpr.202100147 ◽

2021 ◽

pp. 2100147

Author(s):

Yifei Li ◽

Yifeng Wu ◽

Heshan Yu ◽

Ichiro Takeuchi ◽

Rafael Jaramillo

Keyword(s):

Deep Learning ◽

Spectroscopic Ellipsometry ◽

Rapid Analysis ◽

Ellipsometry Data ◽

Spectroscopic Ellipsometry Data

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High-speed analysis of spectroscopic ellipsometry data using deep learning methods

10.1364/iprsn.2021.jw3d.4 ◽

2021 ◽

Author(s):

Yifei Li ◽

Yifeng Wu ◽

Heshan Yu ◽

Ichiro Takeuchi ◽

Rafael Jaramillo

Keyword(s):

Deep Learning ◽

Spectroscopic Ellipsometry ◽

High Speed ◽

Learning Methods ◽

High Speed Analysis ◽

Ellipsometry Data ◽

Spectroscopic Ellipsometry Data

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Parametric sensitivity analysis as an essential ingredient of spectroscopic ellipsometry data modeling: An application of the Morris screening method

Journal of Applied Physics ◽

10.1063/1.5126074 ◽

2019 ◽

Vol 126 (18) ◽

pp. 184901 ◽

Cited By ~ 1

Author(s):

D. V. Likhachev

Keyword(s):

Sensitivity Analysis ◽

Spectroscopic Ellipsometry ◽

Screening Method ◽

Data Modeling ◽

Essential Ingredient ◽

Parametric Sensitivity ◽

Parametric Sensitivity Analysis ◽

Ellipsometry Data ◽

Spectroscopic Ellipsometry Data

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Application of a B-spline model dielectric function to infrared spectroscopic ellipsometry data analysis

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.5126110 ◽

2020 ◽

Vol 38 (1) ◽

pp. 014001

Author(s):

Joel Mohrmann ◽

Thomas E. Tiwald ◽

Jeffrey S. Hale ◽

James N. Hilfiker ◽

Andrew C. Martin

Keyword(s):

Data Analysis ◽

Dielectric Function ◽

Spectroscopic Ellipsometry ◽

B Spline ◽

Infrared Spectroscopic ◽

Ellipsometry Data ◽

Spectroscopic Ellipsometry Data

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Lubricant homogeneity of industrial rough metallic substrates: a multivariate statistical analysis of spectroscopic ellipsometry data

Revue de Métallurgie ◽

10.1051/metal/2012002 ◽

2012 ◽

Vol 109 (2) ◽

pp. 81-91

Author(s):

L. Abdessemed ◽

M. Voué

Keyword(s):

Statistical Analysis ◽

Spectroscopic Ellipsometry ◽

Multivariate Statistical Analysis ◽

Multivariate Statistical ◽

Metallic Substrates ◽

Ellipsometry Data ◽

Spectroscopic Ellipsometry Data

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Determination of accurate critical-point energies, linewidths and line shapes from spectroscopic ellipsometry data

Thin Solid Films ◽

10.1016/0040-6090(93)90078-4 ◽

1993 ◽

Vol 233 (1-2) ◽

pp. 148-152 ◽

Cited By ~ 14

Author(s):

J.W. Garland ◽

Charles C. Kim ◽

H. Abad ◽

P.M. Raccah

Keyword(s):

Critical Point ◽

Spectroscopic Ellipsometry ◽

Line Shapes ◽

Ellipsometry Data ◽

Spectroscopic Ellipsometry Data

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Use of the biased estimator in the interpretation of spectroscopic ellipsometry data

Applied Optics ◽

10.1364/ao.30.003354 ◽

1991 ◽

Vol 30 (23) ◽

pp. 3354 ◽

Cited By ~ 96

Author(s):

G. E. Jellison

Keyword(s):

Spectroscopic Ellipsometry ◽

Ellipsometry Data ◽

Spectroscopic Ellipsometry Data

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Spectroscopic ellipsometry data analysis: measured versus calculated quantities

Thin Solid Films ◽

10.1016/s0040-6090(97)00765-7 ◽

1998 ◽

Vol 313-314 ◽

pp. 33-39 ◽

Cited By ~ 282

Author(s):

G.E. Jellison, Jr

Keyword(s):

Data Analysis ◽

Spectroscopic Ellipsometry ◽

Ellipsometry Data ◽

Spectroscopic Ellipsometry Data

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Selecting the right number of knots for B-spline parameterization of the dielectric functions in spectroscopic ellipsometry data analysis

Thin Solid Films ◽

10.1016/j.tsf.2017.06.056 ◽

2017 ◽

Vol 636 ◽

pp. 519-526 ◽

Cited By ~ 14

Author(s):

D.V. Likhachev

Keyword(s):

Data Analysis ◽

Spectroscopic Ellipsometry ◽

B Spline ◽

The Right ◽

Ellipsometry Data ◽

Spectroscopic Ellipsometry Data

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Model selection in spectroscopic ellipsometry data analysis: Combining an information criteria approach with screening sensitivity analysis

Applied Surface Science ◽

10.1016/j.apsusc.2016.09.139 ◽

2017 ◽

Vol 421 ◽

pp. 617-623 ◽

Cited By ~ 3

Author(s):

D.V. Likhachev

Keyword(s):

Sensitivity Analysis ◽

Data Analysis ◽

Model Selection ◽

Spectroscopic Ellipsometry ◽

Information Criteria ◽

Screening Sensitivity ◽

Ellipsometry Data ◽

Spectroscopic Ellipsometry Data

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Criteria for the extraction of SIMOX material parameters from spectroscopic ellipsometry data

Applied Surface Science ◽

10.1016/0169-4332(93)90061-f ◽

1993 ◽

Vol 63 (1-4) ◽

pp. 40-44 ◽

Cited By ~ 3

Author(s):

S. Lynch ◽

G.M. Crean ◽

R. Greef ◽

J. Stoemonos

Keyword(s):

Spectroscopic Ellipsometry ◽

Material Parameters ◽

Ellipsometry Data ◽

Spectroscopic Ellipsometry Data

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