Parametric sensitivity analysis as an essential ingredient of spectroscopic ellipsometry data modeling: An application of the Morris screening method

D. V. Likhachev

doi:10.1063/1.5126074

Parametric sensitivity analysis as an essential ingredient of spectroscopic ellipsometry data modeling: An application of the Morris screening method

Journal of Applied Physics ◽

10.1063/1.5126074 ◽

2019 ◽

Vol 126 (18) ◽

pp. 184901 ◽

Cited By ~ 1

Author(s):

D. V. Likhachev

Keyword(s):

Sensitivity Analysis ◽

Spectroscopic Ellipsometry ◽

Screening Method ◽

Data Modeling ◽

Essential Ingredient ◽

Parametric Sensitivity ◽

Parametric Sensitivity Analysis ◽

Ellipsometry Data ◽

Spectroscopic Ellipsometry Data

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Efficient thin-film stack characterization using parametric sensitivity analysis for spectroscopic ellipsometry in semiconductor device fabrication

Thin Solid Films ◽

10.1016/j.tsf.2015.05.049 ◽

2015 ◽

Vol 589 ◽

pp. 258-263 ◽

Cited By ~ 5

Author(s):

D.V. Likhachev

Keyword(s):

Thin Film ◽

Sensitivity Analysis ◽

Spectroscopic Ellipsometry ◽

Semiconductor Device ◽

Device Fabrication ◽

Parametric Sensitivity ◽

Parametric Sensitivity Analysis

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Model selection in spectroscopic ellipsometry data analysis: Combining an information criteria approach with screening sensitivity analysis

Applied Surface Science ◽

10.1016/j.apsusc.2016.09.139 ◽

2017 ◽

Vol 421 ◽

pp. 617-623 ◽

Cited By ~ 3

Author(s):

D.V. Likhachev

Keyword(s):

Sensitivity Analysis ◽

Data Analysis ◽

Model Selection ◽

Spectroscopic Ellipsometry ◽

Information Criteria ◽

Screening Sensitivity ◽

Ellipsometry Data ◽

Spectroscopic Ellipsometry Data

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Parametric sensitivity analysis for thermal runaway in semi-batch reactors: Application to cyclohexanone peroxide reactions

Journal of Loss Prevention in the Process Industries ◽

10.1016/j.jlp.2021.104436 ◽

2021 ◽

Vol 70 ◽

pp. 104436

Author(s):

Na Zang ◽

Xin-Ming Qian ◽

Chi-Min Shu ◽

Dejian Wu

Keyword(s):

Sensitivity Analysis ◽

Thermal Runaway ◽

Batch Reactors ◽

Parametric Sensitivity ◽

Parametric Sensitivity Analysis

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Identification of Dynamic Metabolic Flux Balance Models Based on Parametric Sensitivity Analysis

Industrial & Engineering Chemistry Research ◽

10.1021/acs.iecr.6b03331 ◽

2017 ◽

Vol 56 (8) ◽

pp. 1911-1919 ◽

Cited By ~ 5

Author(s):

Ricardo Martinez Villegas ◽

Hector Budman ◽

Ali Elkamel

Keyword(s):

Sensitivity Analysis ◽

Metabolic Flux ◽

Parametric Sensitivity ◽

Flux Balance ◽

Parametric Sensitivity Analysis

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An investigation of catalytic plate reactors by means of parametric sensitivity analysis

Chemical Engineering Science ◽

10.1016/s0009-2509(02)00042-8 ◽

2002 ◽

Vol 57 (9) ◽

pp. 1653-1659 ◽

Cited By ~ 9

Author(s):

M. Zanfir ◽

A. Gavriilidis

Keyword(s):

Sensitivity Analysis ◽

Parametric Sensitivity ◽

Parametric Sensitivity Analysis

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Avoidance Trajectories Using Reachable Sets and Parametric Sensitivity Analysis

IFIP Advances in Information and Communication Technology - System Modeling and Optimization ◽

10.1007/978-3-642-36062-6_49 ◽

2013 ◽

pp. 491-500 ◽

Cited By ~ 7

Author(s):

Matthias Gerdts ◽

Ilaria Xausa

Keyword(s):

Sensitivity Analysis ◽

Reachable Sets ◽

Parametric Sensitivity ◽

Parametric Sensitivity Analysis

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Parametric sensitivity analysis of FDDI MAC scheme

1997 IEEE 6th International Conference on Emerging Technologies and Factory Automation Proceedings, EFTA '97 ◽

10.1109/etfa.1997.616281 ◽

2002 ◽

Author(s):

H. Westphal ◽

S. Renganathan

Keyword(s):

Sensitivity Analysis ◽

Parametric Sensitivity ◽

Parametric Sensitivity Analysis ◽

Mac Scheme

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Parametric Sensitivity Analysis of Oscillatory Delay Systems with an Application to Gene Regulation

Bulletin of Mathematical Biology ◽

10.1007/s11538-017-0298-x ◽

2017 ◽

Vol 79 (7) ◽

pp. 1539-1563 ◽

Cited By ~ 3

Author(s):

Brian Ingalls ◽

Maya Mincheva ◽

Marc R. Roussel

Keyword(s):

Sensitivity Analysis ◽

Gene Regulation ◽

Delay Systems ◽

Parametric Sensitivity ◽

Parametric Sensitivity Analysis

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Parametric sensitivity analysis of power transformer differential protection

2017 Workshop on Communication Networks and Power Systems (WCNPS) ◽

10.1109/wcnps.2017.8252932 ◽

2017 ◽

Author(s):

L. M. Peres ◽

K. M. Silva

Keyword(s):

Sensitivity Analysis ◽

Power Transformer ◽

Differential Protection ◽

Parametric Sensitivity ◽

Parametric Sensitivity Analysis ◽

Transformer Differential Protection

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Mechanical Parametric Sensitivity Analysis of High-Speed Permanent Magnet Synchronous Machine

IEEE Transactions on Applied Superconductivity ◽

10.1109/tasc.2021.3094436 ◽

2021 ◽

pp. 1-1

Author(s):

Yuxi Gu ◽

Xiaoyuan Wang ◽

Peng Gao ◽

Xiaoning Li

Keyword(s):

Sensitivity Analysis ◽

Permanent Magnet ◽

High Speed ◽

Synchronous Machine ◽

Permanent Magnet Synchronous Machine ◽

Parametric Sensitivity ◽

Parametric Sensitivity Analysis

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