Optical Vacuum Sensor Based on Lanthanide Upconversion—Luminescence Thermometry as a Tool for Ultralow Pressure Sensing

2020 ◽  
Vol 5 (4) ◽  
pp. 1901091 ◽  
Author(s):  
Marcin Runowski ◽  
Przemysław Woźny ◽  
Stefan Lis ◽  
Víctor Lavín ◽  
Inocencio R. Martín
2008 ◽  
Vol 05 (03) ◽  
pp. 189-196
Author(s):  
Y. MA ◽  
R. P. W. LAWSON ◽  
A. M. ROBINSON

A Complementary Metal Oxide Silicon (CMOS) optical micro-radiator vacuum sensor has been designed, tested and calibrated. The package is comprised of a micromachined radiator and a photodetector. The sensitivity improvement of the system over the conventional Pirani gauge is up to nine magnitudes depending on the operating power of the micro-radiator. To increase sensor's dynamic range, an automated power-switching system has been demonstrated for pressure sensing operated with constant photodetector output. Calibration of the system has been performed by comparison with secondary standards. Experimental results showed that the sensor's measurement range from 10-3 Pa to 105 Pa has been achieved as its relative error is less than 8%.


2019 ◽  
Vol 44 (19) ◽  
pp. 4678 ◽  
Author(s):  
Raheel Ahmed Janjua ◽  
Umer Farooq ◽  
Rucheng Dai ◽  
Zhongping Wang ◽  
Zengming Zhang

2020 ◽  
Vol 41 (11) ◽  
pp. 1351-1357
Author(s):  
Mei-juan YUANG ◽  
◽  
Jing LI ◽  
Hui-lian QIN ◽  
Ya-ru PENG ◽  
...  

2019 ◽  
Vol 96 ◽  
pp. 109286
Author(s):  
Abhishek Kumar ◽  
Luís Pinto da Silva ◽  
Joaquim C.G. Esteves da Silva ◽  
Kaushal Kumar

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