Enhancing Interconnect Reliability and Performance by Converting Tantalum to 2D Layered Tantalum Sulfide at Low Temperature
2019 ◽
Vol 2019
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pp. 1-8
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2007 ◽
Vol 42
(10)
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pp. 3747-3756
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Keyword(s):
Keyword(s):
2020 ◽
Vol 11
(3)
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pp. 1093-1099
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Keyword(s):
Keyword(s):
2008 ◽
Vol 223
(2)
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pp. 107-113
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2002 ◽
Vol 86
(Appendix)
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pp. 256-256