scholarly journals Fast Surface Profiling by White-Light Interferometry Using a Sampling Theorem for Band-Pass Signals

2000 ◽  
Vol 36 (1) ◽  
pp. 16-25 ◽  
Author(s):  
Akira HIRABAYASHI ◽  
Hidemitsu OGAWA ◽  
Tatsuya MIZUTANI ◽  
Ken NAGAI ◽  
Katsuichi KITAGAWA
Keyword(s):  
White Light ◽  
Sampling Theorem ◽  
White Light Interferometry ◽  
Surface Profiling ◽  
Band Pass

Extensive-dynamic-range and high-resolution surface profiling with phase-sensitive spectral-domain white-light interferometry

2021 ◽  
Vol 60 (13) ◽  
pp. 3604
Author(s):  
Zhicheng Jiao ◽  
Yunfei Jiang ◽  
Yuqian Zhao ◽  
Jian Liu ◽  
Yao Yu ◽  
...  
Keyword(s):  
High Resolution ◽  
White Light ◽  
Dynamic Range ◽  
Spectral Domain ◽  
White Light Interferometry ◽  
Surface Profiling ◽  
Phase Sensitive

Algorithm with optimum noise suppression for surface profiling by white-light interferometry

2004 ◽  
Author(s):  
Akira Hirabayashi ◽  
Yoji Nakayama ◽  
Hidemitsu Ogawa ◽  
Katsuichi Kitagawa
Keyword(s):  
White Light ◽  
Noise Suppression ◽  
White Light Interferometry ◽  
Surface Profiling

White light interferometry for surface profiling with a colour CCD

2012 ◽  
Vol 50 (8) ◽  
pp. 1084-1088 ◽  
Author(s):  
U. Paul Kumar ◽  
Wang Haifeng ◽  
N. Krishna Mohan ◽  
M.P. Kothiyal
Keyword(s):  
White Light ◽  
White Light Interferometry ◽  
Surface Profiling

Fringe order identification in optical fibre white-light interferometry using centroid algorithm method

1992 ◽  
Vol 28 (6) ◽  
pp. 553 ◽  
Author(s):  
S. Chen ◽  
A.W. Palmer ◽  
K.T.V. Grattan ◽  
B.T. Meggitt
Keyword(s):  
Optical Fibre ◽  
White Light ◽  
White Light Interferometry ◽  
Fringe Order ◽  
Centroid Algorithm

scholarly journals Integrated, Speckle-Based Displacement Measurement for Lateral Scanning White Light Interferometry

Sensors ◽  
2021 ◽  
Vol 21 (7) ◽  
pp. 2486
Author(s):  
Gert Behrends ◽  
Dirk Stöbener ◽  
Andreas Fischer
Keyword(s):  
White Light ◽  
Lateral Displacement ◽  
Displacement Measurement ◽  
Accurate Information ◽  
White Light Interferometry ◽  
Fully Integrated ◽  
Speckle Correlation ◽  
Dsc Measurements ◽  
Scanning White Light Interferometry ◽  
The Impact

Lateral scanning white light interferometry (LSWLI) is a promising technique for high-resolution topography measurements on moving surfaces. To achieve resolutions typically associated with white light interferometry, accurate information on the lateral displacement of the measured surface is essential. Since the uncertainty requirement for a respective displacement measurement is currently not known, Monte Carlo simulations of LSWLI measurements are carried out at first to assess the impact of the displacement uncertainty on the topography measurement. The simulation shows that the uncertainty of the displacement measurement has a larger influence on the total height uncertainty than the uncertainty of the displacing motion itself. Secondly, a sufficiently precise displacement measurement by means of digital speckle correlation (DSC) is proposed that is fully integrated into the field of view of the interferometer. In contrast to externally applied displacement measurement systems, the integrated combination of DSC with LSWLI needs no synchronization and calibration, and it is applicable for translatory as well as rotatory scans. To demonstrate the findings, an LSWLI setup with integrated DSC measurements is realized and tested on a rotating cylindrical object with a surface made of a linear encoder strip.

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