SAW Propagation Characteristics on Piezoelectric Layer/Diamond Substrate Structure

1989 ◽  
Vol 28 (S2) ◽  
pp. 209
Author(s):  
Shin-ichi Yamamoto ◽  
Atsushi Tani ◽  
Takashi Gounji
Keyword(s):  
Piezoelectric Layer ◽  
Propagation Characteristics ◽  
Substrate Structure ◽  
Diamond Substrate

Analysis of propagation characteristics of Rayleigh surface acoustic waves on Yb0.33Al0.67N piezoelectric films/high-velocity substrates

2022 ◽  
Author(s):  
Masashi Suzuki ◽  
Shoji Kakio
Keyword(s):  
High Velocity ◽  
Acoustic Waves ◽  
Surface Acoustic Waves ◽  
Film Surface ◽  
Layered Structures ◽  
Coupling Factor ◽  
Propagation Characteristics ◽  
Effective Coupling ◽  
Diamond Substrate ◽  
Coupling Factors

Abstract Piezoelectricity of YbAlN films has recently been shown to be almost as high as that of ScAlN films. YbAlN film surface acoustic wave (SAW) resonators are expected to have a high coupling factor. We theoretically investigated the propagation characteristics of first-mode Rayleigh SAWs (RSAWs) on Yb0.33Al0.67N film/high-velocity Si, sapphire, AlN, SiC, BN, and diamond substrates. The first-mode RSAWs on the YbAlN layered structures had high coupling factors, higher than those on ScAlN layered structures. An enhancement of the effective coupling factor of the first mode RSAWs was observed in polarity inverted YbAlN film/BN or diamond substrate structures.

Propagation Characteristics of SAW on ZnO/AlN/GaAs-Substrate Structure

1988 ◽  
Vol 27 (S1) ◽  
pp. 151
Author(s):  
Ken-ya Hashimoto ◽  
Hiroaki Takada ◽  
Masatsune Yamaguchi
Keyword(s):  
Gaas Substrate ◽  
Propagation Characteristics ◽  
Substrate Structure

Propagation Characteristics of SAW on a ZnO/SiO2/high-velocity-substrate Structure

1986 ◽  
Vol 25 (S1) ◽  
pp. 127 ◽  
Author(s):  
Masatsune Yamaguchi ◽  
Masayuki Tanno ◽  
Ken-ya Hashimoto ◽  
Hiroshi Kogo
Keyword(s):  
High Velocity ◽  
Propagation Characteristics ◽  
Substrate Structure
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