scholarly journals Reduction of surface plasma loss of indium tin oxide thin films by regulating substrate temperature

2018 ◽  
Vol 67 (18) ◽  
pp. 180201
Author(s):  
Cai Xin-Yang ◽  
Wang Xin-Wei ◽  
Zhang Yu-Ping ◽  
Wang Deng-Kui ◽  
Fang Xuan ◽  
...  
Keyword(s):  
Thin Films ◽  
Substrate Temperature ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Surface Plasma ◽  
Oxide Thin Films ◽  
Plasma Loss

Pulsed Laser Deposition of Low-Resistivity Indium Tin Oxide Thin Films at Low Substrate Temperature

1999 ◽  
Vol 38 (Part 1, No. 5A) ◽  
pp. 2710-2716 ◽  
Author(s):  
Frederick Ojo Adurodija ◽  
Hirokazu Izumi ◽  
Tsuguo Ishihara ◽  
Hideki Yoshioka ◽  
Hiroshi Matsui ◽  
...  
Keyword(s):  
Thin Films ◽  
Substrate Temperature ◽  
Pulsed Laser Deposition ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Oxide Thin Films ◽  
Low Resistivity

Influences of Sputtering Power and Substrate Temperature on the Properties of RF Magnetron Sputtered Indium Tin Oxide Thin Films

1999 ◽  
Vol 38 (Part 1, No. 6A) ◽  
pp. 3448-3452 ◽  
Author(s):  
E. Terzini ◽  
G. Nobile ◽  
S. Loreti ◽  
C. Minarini ◽  
T. Polichetti ◽  
...  
Keyword(s):  
Thin Films ◽  
Substrate Temperature ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Thin Films ◽  
Sputtering Power

Plasma-assisted deposition of indium tin oxide thin films by sublimation using an anodic vacuum arc discharge

2021 ◽  
pp. 138731
Author(s):  
Bert Scheffel ◽  
Olaf Zywitzki ◽  
Thomas Preußner ◽  
Torsten Kopte
Keyword(s):  
Thin Films ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Arc Discharge ◽  
Vacuum Arc ◽  
Oxide Thin Films
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