Evolution of electron energy distribution function in capacitively coupled argon plasma driven by very high frequency

Wang Jun;  Wang Tao;  Tang Cheng-Shuang;  Xin Yu

doi:10.7498/aps.65.055203

Evolution of electron energy distribution function in capacitively coupled argon plasma driven by very high frequency

Acta Physica Sinica ◽

10.7498/aps.65.055203 ◽

2016 ◽

Vol 65 (5) ◽

pp. 055203

Author(s):

Wang Jun ◽

Wang Tao ◽

Tang Cheng-Shuang ◽

Xin Yu

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

High Frequency ◽

Electron Energy Distribution Function ◽

Argon Plasma ◽

Energy Distribution Function ◽

Very High Frequency ◽

Capacitively Coupled ◽

Very High

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Optical diagnostics for the highly populated tail of an electron energy distribution function in very-high-frequency capacitively coupled plasma using spin- and dipole-forbidden lines

Journal of Physics D Applied Physics ◽

10.1088/1361-6463/aa6cf8 ◽

2017 ◽

Vol 50 (22) ◽

pp. 225201 ◽

Cited By ~ 1

Author(s):

Hyun-Joon Roh ◽

Nam-Kyun Kim ◽

Sangwon Ryu ◽

Yunchang Jang ◽

Gon-Ho Kim

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

High Frequency ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Very High Frequency ◽

Capacitively Coupled ◽

Very High

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ELECTRON ENERGY DISTRIBUTION FUNCTION AND ATOM IONIZATION PROCESSES IN HIGH FREQUENCY DISCHARGE MERCURY-ARGON PLASMA

Le Journal de Physique Colloques ◽

10.1051/jphyscol:19797103 ◽

1979 ◽

Vol 40 (C7) ◽

pp. C7-209-C7-210

Author(s):

S. D. Wagner ◽

I. S. Nisconen

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

High Frequency ◽

Electron Energy Distribution Function ◽

Argon Plasma ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Ionization Processes ◽

Atom Ionization

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Electron energy distribution function in the collisional-radiative model of an argon plasma

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/18/3/005 ◽

1985 ◽

Vol 18 (3) ◽

pp. 347-358 ◽

Cited By ~ 8

Author(s):

J Vlcek ◽

V Pelikan

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Argon Plasma ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Collisional Radiative Model ◽

Radiative Model

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Formation of the Electron Energy Distribution Function in the Plasma of a High-Frequency Discharge in the Presence of Microparticles

HERALD of Dagestan State University ◽

10.21779/2542-0321-2021-36-4-20-20-27 ◽

2021 ◽

Vol 36 (4) ◽

pp. 20-27

Author(s):

N.A. Ashurbekov ◽

◽

I.G. Ramazanov ◽

K.M. Rabadanov ◽

◽

...

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

High Frequency ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

High Frequency Discharge

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Influence of excitation frequency on the metastable atoms and electron energy distribution function in a capacitively coupled argon discharge

Physics of Plasmas ◽

10.1063/1.5031221 ◽

2018 ◽

Vol 25 (6) ◽

pp. 063501 ◽

Cited By ~ 15

Author(s):

S. Sharma ◽

N. Sirse ◽

M. M. Turner ◽

A. R. Ellingboe

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Excitation Frequency ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

Argon Discharge

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Electron‐energy distribution function measurements in capacitively coupled rf discharges

Journal of Applied Physics ◽

10.1063/1.348935 ◽

1991 ◽

Vol 69 (1) ◽

pp. 121-128 ◽

Cited By ~ 53

Author(s):

G. Dilecce ◽

M. Capitelli ◽

S. De Benedictis

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

Rf Discharges

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Effect of driving frequency on the electron energy distribution function and electron-sheath interaction in a low pressure capacitively coupled plasma

Physics of Plasmas ◽

10.1063/1.4967356 ◽

2016 ◽

Vol 23 (11) ◽

pp. 110701 ◽

Cited By ~ 14

Author(s):

S. Sharma ◽

N. Sirse ◽

P. K. Kaw ◽

M. M. Turner ◽

A. R. Ellingboe

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Low Pressure ◽

Energy Distribution Function ◽

Driving Frequency ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma

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Electron energy distribution function in capacitively coupled RF discharges: difference between electropositive Ar and electronegative SiH4discharges

Plasma Sources Science and Technology ◽

10.1088/0963-0252/9/4/314 ◽

2000 ◽

Vol 9 (4) ◽

pp. 583-591 ◽

Cited By ~ 24

Author(s):

M Yan ◽

A Bogaerts ◽

W J Goedheer ◽

R Gijbels

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

Rf Discharges

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Effect of Electron Energy Distribution Function on Spectroscopic Characteristics of Microwave Discharge Argon Plasma

Japanese Journal of Applied Physics ◽

10.1143/jjap.41.5432 ◽

2002 ◽

Vol 41 (Part 1, No. 8) ◽

pp. 5432-5441 ◽

Cited By ~ 9

Author(s):

Ryouji Kashiwazaki ◽

Hiroshi Akatsuka

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Microwave Discharge ◽

Argon Plasma ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Spectroscopic Characteristics

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Theoretical study on the electron energy distribution function and electron transport parameters of argon plasma

10.1117/12.2182243 ◽

2015 ◽

Cited By ~ 1

Author(s):

Yachun Zhang ◽

Xiang He ◽

Jianping Chen ◽

Jian Lu ◽

Xiaowu Ni ◽

...

Keyword(s):

Distribution Function ◽

Electron Transport ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Theoretical Study ◽

Argon Plasma ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Transport Parameters

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