scholarly journals Magnetic control of the constant-current glow discharge plasma characteristics

2012 ◽  
Vol 61 (4) ◽  
pp. 045201
Author(s):  
Hu Ming ◽  
Wan Shu-De ◽  
Zhong Lei ◽  
Liu Hao ◽  
Wang Hai
Keyword(s):  
Glow Discharge ◽  
Discharge Plasma ◽  
Constant Current ◽  
Glow Discharge Plasma ◽  
Magnetic Control ◽  
Plasma Characteristics

scholarly journals Direct Current Magnetron Glow Discharge Plasma Characteristics Study for Controlled Deposition of Titanium Nitride Thin Film

2013 ◽  
Vol 2013 ◽  
pp. 1-6
Author(s):  
Sankar Moni Borah
Keyword(s):  
Thin Film ◽  
Glow Discharge ◽  
Titanium Nitride ◽  
Direct Current ◽  
Discharge Plasma ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Glow Discharge Plasma ◽  
Cylindrical Magnetron ◽  
Plasma Characteristics

This paper reports on the study of direct current (DC) magnetron glow discharge plasma characteristics in a cylindrical magnetron system in argon-nitrogen. Presence of nitrogen gas makes the plasma environment reactive, and it results in significant changes of the plasma properties—number density, electron temperature, floating potential, and sheath thickness. Applied magnetic field is a parameter which is closely related to proper deposition of thin film. Cylindrical Langmuir probe and Emissive probe are used as diagnostics for the estimation of various plasma parameters indicated earlier. Controlled titanium nitride (TiN) thin film deposition on bell-metal at different argon-nitrogen gases ratio is another important study reported.

scholarly journals Cleaning the surface of products with glow discharge plasma

2020 ◽  
Vol 1686 ◽  
pp. 012013
Author(s):  
V.N. Arustamov ◽  
R.KH. Ashurov ◽  
V.M. Rotchtein ◽  
KH.B. Ashurov ◽  
I.KH. Khudaykulov
Keyword(s):  
Glow Discharge ◽  
Discharge Plasma ◽  
Glow Discharge Plasma

Destruction of Renal Concretions with Electrolytic Glow Discharge Plasma

2021 ◽  
Author(s):  
S. Kh. Ali ◽  
Kh. M. Ali ◽  
E. A. Bezrukov ◽  
S. V. Belov ◽  
Yu. K. Danyleiko ◽  
...  
Keyword(s):  
Glow Discharge ◽  
Discharge Plasma ◽  
Glow Discharge Plasma

Enhanced thermionic emission of mayenite electride composites in an Ar glow discharge plasma

2021 ◽  
Author(s):  
Xiaochuan Tang ◽  
Adam E. Kuehster ◽  
Brodderic A. DeBoer ◽  
Alexander D. Preston ◽  
Kaka Ma
Keyword(s):  
Glow Discharge ◽  
Discharge Plasma ◽  
Thermionic Emission ◽  
Glow Discharge Plasma
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