scholarly journals Dispersion feature in arbitrary direction of surface acoustic wave applied to property characterization of ultra-large-scale integrated circuit interconnect films

2007 ◽  
Vol 56 (4) ◽  
pp. 2428
Author(s):  
Xiao Xia ◽  
You Xue-Yi ◽  
Yao Su-Ying
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Integrated Circuit ◽  
Large Scale ◽  
Arbitrary Direction ◽  
Property Characterization

Addition to "Development of a GaAs monolithic surface acoustic wave integrated circuit"

2000 ◽  
Vol 35 (8) ◽  
pp. 1253 ◽  
Author(s):  
A.G. Baca ◽  
E.J. Heller ◽  
S.A. Casalnuovo ◽  
G.C. Frye-Mason ◽  
J.F. Klem ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Integrated Circuit

In situ high-temperature characterization of AlN-based surface acoustic wave devices

2013 ◽  
Vol 114 (1) ◽  
pp. 014505 ◽  
Author(s):  
Thierry Aubert ◽  
Jochen Bardong ◽  
Ouarda Legrani ◽  
Omar Elmazria ◽  
M. Badreddine Assouar ◽  
...  
Keyword(s):  
High Temperature ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Acoustic Wave Devices

Characterization of the surface acoustic wave induced potential in a heterostructure

1992 ◽  
Vol 84 (7) ◽  
pp. 735-738 ◽  
Author(s):  
J.W.M. Campbell ◽  
F. Guillon ◽  
M. D'Iorio ◽  
M. Buchanan ◽  
R.J. Stoner
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Wave Induced

Development of Multi-Ferroic Actuator/Sensor Material and Device for Intelligent/Smart Technology - Basic Design and Experimental Verification

2008 ◽  
Vol 54 ◽  
pp. 187-194 ◽  
Author(s):  
Yasubumi Furuya ◽  
Teiko Okazaki
Keyword(s):  
Magnetic Field ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
High Speed ◽  
Large Scale ◽  
Coupling Effect ◽  
Active Material ◽  
Smart Technology ◽  
Internal Damage ◽  
Composite Actuator

Technical importance of multi-ferroic approach for designing advanced multi-functional actuator/sensors based on a mutual coupling effect between ferroic material elements is pointed out for intelligent/smart technology. Two types of multi-ferroic actuator/sensor devices. i.e. (1) magnetically driven composite actuator and (2) multi-functional surface acoustic wave (SAW) sensor by MEMS are presented. First, a large-scale robust composite actuator is the composite structure which is reinforced by the superelastic fiber or lamellar of shape memory alloys (TiNi) in the ferromagnetic metal (Ni) matrix. This multi-ferroic composite can be driven with high speed as well as considerably enhanced strain by applying a wireless magnetic field. Secondarily, multi-functionally designed, multi-ferroic senor device using surface acoustic wave (SAW) is introduced. On the surface part between IDTs, environmentally active material films such as SMA, FSMA, magnetostrictive alloy etc. are formed by magnetron-sputtering. Various environmental sensing parameters i.e. temperature, magnetic field strength, stress, loading hysteresis and internal damage etc. can be evaluated nondestructively from the signal analysis of amplitude and phase change of SAW. Consequently, these results show the promising new types of multi-functional composite actuator and sensor based on multi-ferroic effect.

Growth and Characterization of Polyimide-Supported AlN Films for Flexible Surface Acoustic Wave Devices

2016 ◽  
Vol 45 (6) ◽  
pp. 2702-2709 ◽  
Author(s):  
Qi Li ◽  
Hongyan Liu ◽  
Gen Li ◽  
Fei Zeng ◽  
Feng Pan ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Flexible Surface ◽  
Acoustic Wave Devices
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