The PIC/MCC simulation of the ionization processes in electron cyclotron resonance discharge (Ⅱ)——Numerical simulation and discussion of results
1998 ◽
Vol 69
(2)
◽
pp. 1141-1143
◽
2003 ◽
Vol 191
(1)
◽
pp. 228-248
◽
Keyword(s):
2019 ◽
Vol 1386
◽
pp. 012123
2000 ◽
Vol 71
(2)
◽
pp. 1094-1096
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1984 ◽
Vol 45
(C1)
◽
pp. C1-961-C1-963