Influences of growth temperature on the crystalline characteristics and optical  properties for ZnO films deposited by reactive magnetron sputtering

Sun Cheng-Wei;  Liu Zhi-Wen;  Qin Fu-Wen;  Zhang Qing-Yu;  Liu Kun;  Wu Shi-Fa

doi:10.7498/aps.55.1390

Influences of growth temperature on the crystalline characteristics and optical properties for ZnO films deposited by reactive magnetron sputtering

Acta Physica Sinica ◽

10.7498/aps.55.1390 ◽

2006 ◽

Vol 55 (3) ◽

pp. 1390

Author(s):

Sun Cheng-Wei ◽

Liu Zhi-Wen ◽

Qin Fu-Wen ◽

Zhang Qing-Yu ◽

Liu Kun ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Growth Temperature ◽

Reactive Magnetron Sputtering ◽

Zno Films ◽

Reactive Magnetron

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Microstructures and optical properties of Cu-doped ZnO films prepared by radio frequency reactive magnetron sputtering

Applied Surface Science ◽

10.1016/j.apsusc.2011.06.134 ◽

2011 ◽

Vol 257 (23) ◽

pp. 10036-10041 ◽

Cited By ~ 105

Author(s):

Ligang Ma ◽

Shuyi Ma ◽

Haixia Chen ◽

Xiaoqian Ai ◽

Xinli Huang

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Reactive Magnetron Sputtering ◽

Zno Films ◽

Reactive Magnetron ◽

Doped Zno

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Fabrication of thin ZnO films with wide-range tuned optical properties by reactive magnetron sputtering

Semiconductor Science and Technology ◽

10.1088/1361-6641/aaa050 ◽

2018 ◽

Vol 33 (2) ◽

pp. 025004

Author(s):

A Davydova ◽

G Tselikov ◽

D Dilone ◽

K V Rao ◽

A V Kabashin ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Zno Films ◽

Reactive Magnetron ◽

Wide Range

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Structure and optical properties of Cd-substituted ZnO (Zn1−x Cd x O) thin films synthesized by the dc reactive magnetron sputtering

Applied Physics A ◽

10.1007/s00339-014-8451-y ◽

2014 ◽

Vol 117 (2) ◽

pp. 895-900 ◽

Cited By ~ 3

Author(s):

Jinghai Yang ◽

Yonggao Yue ◽

Yingrui Sui ◽

Yan Cao ◽

Maobin Wei ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Dc Reactive Magnetron Sputtering

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Comparison of optical properties of TiO2 thin films prepared by reactive magnetron sputtering and electron-beam evaporation techniques

Semiconductor Physics Quantum Electronics & Optoelectronics ◽

10.15407/spqeo14.04.427 ◽

2011 ◽

Vol 14 (4) ◽

pp. 427-431 ◽

Cited By ~ 6

Author(s):

V. V. Brus ◽

◽

Keyword(s):

Thin Films ◽

Optical Properties ◽

Electron Beam ◽

Magnetron Sputtering ◽

Electron Beam Evaporation ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Tio2 Thin Films

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Temperature dependence of the optical properties of mixed oxide thin films deposited by reactive magnetron sputtering

10.1117/12.625069 ◽

2005 ◽

Author(s):

M. Vergöhl ◽

B. Hunsche ◽

A. Ritz

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Temperature Dependence ◽

Mixed Oxide ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Oxide Thin Films

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Structural, electrical, and optical properties of F-doped SnO or SnO 2 films prepared by RF reactive magnetron sputtering at different substrate temperatures and O 2 fluxes

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2017.05.193 ◽

2017 ◽

Vol 719 ◽

pp. 429-437 ◽

Cited By ~ 17

Author(s):

B.L. Zhu ◽

X. Zhao ◽

W.C. Hu ◽

T.T. Li ◽

J. Wu ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Electrical And Optical Properties ◽

Substrate Temperatures

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The structural, electrical, and optical properties of SnO2 films prepared by reactive magnetron sputtering: Influence of substrate temperature and O2 flow rate

Materials Chemistry and Physics ◽

10.1016/j.matchemphys.2020.123129 ◽

2020 ◽

Vol 250 ◽

pp. 123129

Author(s):

Ye Tao ◽

Bailin Zhu ◽

Yuting Yang ◽

Jun Wu ◽

Xinwei Shi

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Substrate Temperature ◽

Flow Rate ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Electrical And Optical Properties ◽

Influence Of Substrate

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Electrical and optical properties of tantalum oxide thin films prepared by reactive magnetron sputtering

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2011.08.019 ◽

2011 ◽

Vol 509 (41) ◽

pp. 9758-9763 ◽

Cited By ~ 12

Author(s):

A.X. Wei ◽

Z.X. Ge ◽

X.H. Zhao ◽

J. Liu ◽

Y. Zhao

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Tantalum Oxide ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Oxide Thin Films ◽

Electrical And Optical Properties

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Oxygen amount effect on optical properties of aluminium oxide nanostructured films prepared by reactive magnetron sputtering

Optik ◽

10.1016/j.ijleo.2016.02.007 ◽

2016 ◽

Vol 127 (11) ◽

pp. 4635-4638 ◽

Cited By ~ 5

Author(s):

E. Koushki ◽

S.H. Mousavi ◽

J. Baedi

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Aluminium Oxide ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Nanostructured Films ◽

Amount Effect

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Effects of Rapid Thermal Processing on Microstructure and Optical Properties of As-Deposited Ag 2 O Films by Direct-Current Reactive Magnetron Sputtering

Chinese Physics Letters ◽

10.1088/0256-307x/27/2/026804 ◽

2010 ◽

Vol 27 (2) ◽

pp. 026804 ◽

Cited By ~ 6

Author(s):

Gao Xiao-Yong ◽

Feng Hong-Liang ◽

Zhang Zeng-Yuan ◽

Ma Jiao-Min ◽

Lu Jing-Xiao

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Direct Current ◽

Thermal Processing ◽

Rapid Thermal Processing ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron

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