scholarly journals An Areal Isotropic Spline Filter for Surface Metrology

Author(s):  
Hao Zhang ◽  
Mingsi Tong ◽  
Wei Chu
Measurement ◽  
2010 ◽  
Vol 43 (10) ◽  
pp. 1575-1582 ◽  
Author(s):  
Hao Zhang ◽  
Yibao Yuan ◽  
Weiying Piao

2015 ◽  
Vol 40 ◽  
pp. 74-80 ◽  
Author(s):  
Hao Zhang ◽  
Yibao Yuan ◽  
Jin Hua ◽  
Yuzhu Cheng

2020 ◽  
Vol 13 (4) ◽  
pp. 660-675
Author(s):  
ZHANG Shuai ◽  
◽  
◽  
HOU Xi ◽  
◽  
...  

Author(s):  
Julian Wüster ◽  
Yannick Bourgin ◽  
Patrick Feßer ◽  
Arne Behrens ◽  
Stefan Sinzinger

AbstractPolarizing beamsplitters have numerous applications in optical systems, such as systems for freeform surface metrology. They are classically manufactured from birefringent materials or with stacks of dielectric coatings. We present a binary subwavelength-structured form-birefringent diffraction grating, which acts as a polarizing beamsplitter for a wide range of incidence angles −30∘…+30∘. We refine the general design method for such hybrid gratings. We furthermore demonstrate the manufacturing steps with Soft-UV-Nanoimprint-Lithography, as well as the experimental verification, that the structure reliably acts as a polarizing beamsplitter. The experimental results show a contrast in efficiency for TE- and TM-polarization of up to 1:18 in the first order, and 34:1 in the zeroth order. The grating potentially enables us to realize integrated compact optical measurement systems, such as common-path interferometers.


2021 ◽  
Vol 179 ◽  
pp. 108057
Author(s):  
Zhao Zhang ◽  
Sheng Zhang ◽  
Jiashu Zhang
Keyword(s):  

2003 ◽  
Author(s):  
Boris Spektor ◽  
Yurij Parkhomenko ◽  
Josef Shamir

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