scholarly journals Cu Wiring Fabrication by Supercritical Fluid Deposition for MEMS Devices

2019 ◽  
Author(s):  
Eiichi Kondoh
Keyword(s):  
Supercritical Fluid ◽  
Mems Devices

Supercritical fluid fractionation for thymoquinone enrichment in black cumin and savory isolates

Planta Medica ◽  
2009 ◽  
Vol 75 (09) ◽  
Author(s):  
M Sajfrtova ◽  
J Karban ◽  
P Kloucek ◽  
J Malik ◽  
L Kokoska
Keyword(s):  
Supercritical Fluid ◽  
Black Cumin ◽  
Supercritical Fluid Fractionation

Where is the supercritical fluid on the phase diagram?

2012 ◽  
Vol 182 (11) ◽  
pp. 1137-1156 ◽  
Author(s):  
Vadim V. Brazhkin ◽  
A.G. Lyapin ◽  
Valentin N. Ryzhov ◽  
Kostya Trachenko ◽  
Yurii D. Fomin ◽  
...  
Keyword(s):  
Phase Diagram ◽  
Supercritical Fluid

Deposition and Characterization of Al2O3 and BiFeO3 Thin Films on Titanium Substrates for Tough MEMS Devices

2017 ◽  
Vol 137 (1) ◽  
pp. 46-47
Author(s):  
Takeshi Kohno ◽  
Masato Mihara ◽  
Ataru Tanabe ◽  
Takashi Abe ◽  
Masanori Okuyama ◽  
...  
Keyword(s):  
Thin Films ◽  
Mems Devices ◽  
Titanium Substrates

Area-selective Cu Film Growth on TiN and SiO2 by Supercritical Fluid Deposition

2020 ◽  
Vol 140 (1) ◽  
pp. 31-36 ◽  
Author(s):  
Naoto Usami ◽  
Etsuko Ota ◽  
Akio Higo ◽  
Takeshi Momose ◽  
Yoshio Mita
Keyword(s):  
Supercritical Fluid ◽  
Film Growth ◽  
Cu Film
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